Inventor · disambiguated record
Mason L. Freed
Also filed as: FREED MASON · FREED MASON L
13 granted patents·2 pending applications·413 citations·filing 2000–2014
93Inventor score
Files withKLA TENCOR CORP6ONWAFER TECHNOLOGIES INC5BROOKS WILLIAM MATHEWS1MUNDT RANDALL S1ONWAFER TECHNOLOGIES1
Top patents by PatentIndex Score
15 records- 0197US8353628B1Method and system for tomographic projection correctionXRADIA INC·Filed 2009·Granted Jan 15, 2013·63 cites·23 claims
- 0296US6691068B1Methods and apparatus for obtaining data for process operation, optimization, monitoring, and controlONWAFER TECHNOLOGIES INC·Filed 2000·Granted Feb 10, 2004·148 cites·41 claims
- 0389US7960670B2Methods of and apparatuses for measuring electrical parameters of a plasma processKLA TENCOR CORP·Filed 2005·Granted Jun 14, 2011·13 cites·18 claims
- 0489US7299148B2Methods and apparatus for low distortion parameter measurementsONWAFER TECHNOLOGIES INC·Filed 2005·Granted Nov 20, 2007·20 cites·23 claims
- 0587US6671660B2Methods and apparatus for power controlONWAFER TECHNOLOGIES INC·Filed 2002·Granted Dec 30, 2003·51 cites·19 claims
- 0680US7531984B2Sensor apparatus power transfer, communication and maintenance methods and apparatusKLA TENCOR CORP·Filed 2006·Granted May 12, 2009·15 cites·17 claims
- 0780US6789034B2Data collection methods and apparatus with parasitic correctionONWAFER TECHNOLOGIES INC·Filed 2002·Granted Sep 7, 2004·26 cites·20 claims
- 0879US7580767B2Methods of and apparatuses for maintenance, diagnosis, and optimization of processesKLA TENCOR CORP·Filed 2005·Granted Aug 25, 2009·12 cites·21 claims
- 0977US8698037B2Methods of and apparatuses for maintenance, diagnosis, and optimization of processesMUNDT RANDALL S·Filed 2011·Granted Apr 15, 2014·3 cites·7 claims
- 1077US6971036B2Methods and apparatus for low power delay controlONWAFER TECHNOLOGIES·Filed 2002·Granted Nov 29, 2005·30 cites·20 claims
- 1175US7482576B2Apparatuses for and methods of monitoring optical radiation parameters for substrate processing operationsKLA TENCOR CORP·Filed 2006·Granted Jan 27, 2009·8 cites·25 claims
- 1272US7282889B2Maintenance unit for a sensor apparatusONWAFER TECHNOLOGIES INC·Filed 2004·Granted Oct 16, 2007·24 cites·37 claims
- 1358US9029728B2Methods of and apparatuses for measuring electrical parameters of a plasma processKLA TENCOR CORP·Filed 2014·Granted May 12, 2015·0 cites·14 claims
- 1449US2009292506A1Methods of and apparatuses for maintenance, diagnosis, and optimization of processesKLA TENCOR CORP·Filed 2009·Application pending·0 cites
- 1527US2011193702A1Wireless apparatuses, systems, and methods for locating itemsBROOKS WILLIAM MATHEWS·Filed 2010·Application pending·0 cites
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