Inventor · disambiguated record
Mingying Ma
Also filed as: MA MINGYING
1 granted patent·1 pending application·0 citations·filing 2006–2016
5Inventor score
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2 records- 0138US8035801B2Method for in-situ aberration measurement of optical imaging system in lithographic toolsSHANGHAI MICROELECTRONICS EQUI·Filed 2006·Granted Oct 11, 2011·0 cites·14 claims
- 0225US2019015929A1Laser annealing device and annealing method thereforSHANGHAI MICRO ELECTRONICS EQUIPMENT GROUP CO LTD·Filed 2016·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →