Inventor · disambiguated record
Yuri Johannes Gabriël Van De Vijver
Also filed as: VAN DE VIJVER YURI JOHANNES GABRIEL · VAN DE VIJVER YURI JOHANNES GABRIËL
23 granted patents·3 pending applications·31 citations·filing 2004–2023
92Inventor score
Files withASML NETHERLANDS BV18NIENHUYS HAN-KWANG2VAN DE VIJVER YURI JOHANNES GABRIEL2VAN EMPEL TJARKO ADRIAAN RUDOLF2LABETSKI DZMITRY1
Top patents by PatentIndex Score
26 records- 0191US8730448B2Lithographic apparatus and device manufacturing methodNIENHUYS HAN-KWANG·Filed 2012·Granted May 20, 2014·9 cites·19 claims
- 0277US10895808B2Substrate holder, a lithographic apparatus and method of manufacturing devicesASML NETHERLANDS BV·Filed 2016·Granted Jan 19, 2021·2 cites·19 claims
- 0372US11664264B2Lithographic apparatus, method for unloading a substrate and method for loading a substrateASML NETHERLANDS BV·Filed 2016·Granted May 30, 2023·2 cites·24 claims
- 0467US9753382B2Sensor, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2013·Granted Sep 5, 2017·1 cites·20 claims
- 0567US8797504B2Lithographic apparatus and device manufacturing methodNIENHUYS HAN-KWANG·Filed 2012·Granted Aug 5, 2014·1 cites·19 claims
- 0666US11579533B2Substrate holder, a lithographic apparatus and method of manufacturing devicesASML NETHERLANDS BV·Filed 2021·Granted Feb 14, 2023·0 cites·20 claims
- 0766US11385547B2Extraction body for lithographic apparatusASML NETHERLANDS BV·Filed 2020·Granted Jul 12, 2022·0 cites·20 claims
- 0865US8115900B2Lithographic apparatus and device manufacturing methodVAN DE VIJVER YURI JOHANNES GABRIEL·Filed 2007·Granted Feb 14, 2012·6 cites·23 claims
- 0964US2023260820A1Lithographic apparatus, method for unloading a substrate and method for loading a substrateASML NETHERLANDS BV·Filed 2023·Application pending·0 cites
- 1061US8220315B2Gas gauge, lithographic apparatus and device manufacturing methodLABETSKI DZMITRY·Filed 2009·Granted Jul 17, 2012·1 cites·5 claims
- 1160US10571810B2Substrate table, a lithographic apparatus and a method of operating a lithographic apparatusASML NETHERLANDS BV·Filed 2019·Granted Feb 25, 2020·0 cites·20 claims
- 1260US7476491B2Lithographic apparatus, gas supply system, method for purging, and device manufacturing method and device manufactured therebyASML NETHERLANDS BV·Filed 2004·Granted Jan 13, 2009·6 cites·10 claims
- 1356US10534270B2Lithography apparatus, a method of manufacturing a device and a control programASML NETHERLANDS BV·Filed 2019·Granted Jan 14, 2020·0 cites·20 claims
- 1456US8901521B2Module and method for producing extreme ultraviolet radiationVAN EMPEL TJARKO ADRIAAN RUDOLF·Filed 2008·Granted Dec 2, 2014·3 cites·31 claims
- 1555US9971254B2Sensor, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2017·Granted May 15, 2018·0 cites·20 claims
- 1654US10705426B2Extraction body for lithographic apparatusASML NETHERLANDS BV·Filed 2017·Granted Jul 7, 2020·0 cites·20 claims
- 1754US8094287B2Lithographic appararus and methodVAN EMPEL TJARKO ADRIAAN RUDOLF·Filed 2008·Granted Jan 10, 2012·0 cites·18 claims
- 1853US10317804B2Substrate table, lithographic apparatus and method of operating a lithographic apparatusASML NETHERLANDS BV·Filed 2016·Granted Jun 11, 2019·0 cites·20 claims
- 1953US9363879B2Module and method for producing extreme ultraviolet radiationASML NETHERLANDS BV·Filed 2014·Granted Jun 7, 2016·0 cites·19 claims
- 2050US10310394B2Lithographic apparatus, a projection system and a device manufacturing methodASML NETHERLANDS BV·Filed 2016·Granted Jun 4, 2019·0 cites·14 claims
- 2150US2010309447A1lithographic apparatus, a projection system and a device manufacturing methodASML NETHERLANDS BV·Filed 2008·Application pending·0 cites
- 2246US10261422B2Lithography apparatus and method of manufacturing a deviceASML NETHERLANDS BV·Filed 2015·Granted Apr 16, 2019·0 cites·20 claims
- 2344US8749756B2Lithographic apparatus and device manufacturing methodVAN DE VIJVER YURI JOHANNES GABRIEL·Filed 2012·Granted Jun 10, 2014·0 cites·20 claims
- 2444US8711325B2Method and system for determining a suppression factor of a suppression system and a lithographic apparatusSCHIMMEL HENDRIKUS GIJSBERTUS·Filed 2008·Granted Apr 29, 2014·0 cites·22 claims
- 2541US7446849B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Nov 4, 2008·0 cites·20 claims
- 2638US2021053177A1System, device and method for reconditioning a substrate supportASML NETHERLANDS BV·Filed 2019·Application pending·0 cites
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