Assignee
LABETSKI DZMITRY
NL·3 granted patents·1 pending application·3 citations·filing 2009–2011
Top patents by PatentIndex Score
4 records- 0172US9013679B2Collector mirror assembly and method for producing extreme ultraviolet radiationLABETSKI DZMITRY·Filed 2011·Granted Apr 21, 2015·2 cites·16 claims
- 0261US8220315B2Gas gauge, lithographic apparatus and device manufacturing methodLABETSKI DZMITRY·Filed 2009·Granted Jul 17, 2012·1 cites·5 claims
- 0338US8405055B2Source module, radiation source and lithographic apparatusLABETSKI DZMITRY·Filed 2009·Granted Mar 26, 2013·0 cites·14 claims
- 0435US2012327381A1Radiation Source, Lithographic Apparatus and Device Manufacturing MethodLABETSKI DZMITRY·Filed 2011·Application pending·0 cites
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