Inventor · disambiguated record
Dennis L. Goodwin
Also filed as: GOODWIN DENNIS · GOODWIN DENNIS L · GOODWIN DENNIS LEE · GOODWIN SR DENNIS
24 granted patents·4 pending applications·2,619 citations·filing 1982–2018
97Inventor score
Top patents by PatentIndex Score
28 records- 0198US5997588ASemiconductor processing system with gas curtainADVANCED SEMICONDUCTOR MAT·Filed 1996·Granted Dec 7, 1999·664 cites·40 claims
- 0298US4828224AChemical vapor deposition systemEPSILON TECHN INC·Filed 1987·Granted May 9, 1989·557 cites·2 claims
- 0397US6068441ASubstrate transfer system for semiconductor processing equipmentASM INC·Filed 1997·Granted May 30, 2000·545 cites·25 claims
- 0493US5080549AWafer handling system with Bernoulli pick-upEPSILON TECHN INC·Filed 1990·Granted Jan 14, 1992·170 cites·14 claims
- 0593US5020475ASubstrate handling and transporting apparatusEPSILON TECHN INC·Filed 1989·Granted Jun 4, 1991·64 cites·40 claims
- 0690US5092728ASubstrate loading apparatus for a CVD processEPSILON TECHN INC·Filed 1989·Granted Mar 3, 1992·51 cites·7 claims
- 0789US7018479B2Rotating semiconductor processing apparatusASM INC·Filed 2003·Granted Mar 28, 2006·33 cites·13 claims
- 0889US5324155AWafer handling system with bernoulli pick-upADVANCED SEMICONDUCTOR MAT·Filed 1992·Granted Jun 28, 1994·105 cites·15 claims
- 0987US6293749B1Substrate transfer system for semiconductor processing equipmentASM INC·Filed 1998·Granted Sep 25, 2001·95 cites·44 claims
- 1087US5435682AChemical vapor desposition systemADVANCED SEMICONDUCTOR MAT·Filed 1994·Granted Jul 25, 1995·74 cites·10 claims
- 1185US4874464AProcess for epitaxial deposition of siliconEPSILON LP·Filed 1988·Granted Oct 17, 1989·36 cites·21 claims
- 1283US6183183B1Dual arm linear hand-off wafer transfer assemblyASM INC·Filed 1998·Granted Feb 6, 2001·54 cites·8 claims
- 1379US6435809B2Dual arm linear hand-off wafer transfer assemblyASM INC·Filed 2000·Granted Aug 20, 2002·17 cites·7 claims
- 1478US5156521AMethod for loading a substrate into a GVD apparatusEPSILON TECHN INC·Filed 1991·Granted Oct 20, 1992·30 cites·13 claims
- 1577US10138551B2Substrate processing apparatuses and systemsGOODWIN SR DENNIS·Filed 2011·Granted Nov 27, 2018·5 cites·22 claims
- 1676US6554905B1Rotating semiconductor processing apparatusASM INC·Filed 2000·Granted Apr 29, 2003·14 cites·12 claims
- 1775US6435799B2Wafer transfer arm stopASM INC·Filed 2000·Granted Aug 20, 2002·13 cites·15 claims
- 1873US6331023B1Gridded substrate transport spatulaASM INC·Filed 2000·Granted Dec 18, 2001·19 cites·17 claims
- 1967US6161311ASystem and method for reducing particles in epitaxial reactorsASM INC·Filed 1998·Granted Dec 19, 2000·33 cites·13 claims
- 2063US6550158B2Substrate handling chamberASM INC·Filed 2000·Granted Apr 22, 2003·5 cites·10 claims
- 2163US6394440B1Dual orientation leveling platform for semiconductor apparatusASM INC·Filed 2000·Granted May 28, 2002·13 cites·33 claims
- 2262US4774386ASpanning deviceGOODWIN DENNIS·Filed 1982·Granted Sep 27, 1988·19 cites·20 claims
- 2358US9175419B2Apparatus for delivering precursor gases to an epitaxial growth substrateARENA CHANTAL·Filed 2008·Granted Nov 3, 2015·0 cites·12 claims
- 2456US2019062910A1Electrical Resistance Heater and Heater AssembliesGES ASS L L C·Filed 2018·Application pending·0 cites
- 2555US6617247B2Method of processing a semiconductor wafer in a reaction chamber with a rotating componentASM INC·Filed 2002·Granted Sep 9, 2003·3 cites·16 claims
- 2650US2004074122A1Permit driver/young driver warning apparatusFiled 2002·Application pending·0 cites
- 2739US2012149210A1Systems, apparatuses, and methods for chemically processing substrates using the coanda effectCOLVIN RONALD L·Filed 2011·Application pending·0 cites
- 2839US2012145701A1Electrical resistance heater and heater assembliesCOLVIN RONALD L·Filed 2011·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →