Inventor · disambiguated record
James Broc Stirton
Also filed as: STIRTON JAMES B · STIRTON JAMES BROC
44 granted patents·959 citations·filing 2001–2016
98Inventor score
Files withADVANCED MICRO DEVICES INC37GLOBALFOUNDRIES INC5ADVANCED MICRON DEVICES INC1CHAUHAN SIDDHARTH1
Top patents by PatentIndex Score
44 records- 0197US6458605B1Method and apparatus for controlling photolithography overlay registrationADVANCED MICRO DEVICES INC·Filed 2001·Granted Oct 1, 2002·104 cites·64 claims
- 0297US6383888B1Method and apparatus for selecting wafer alignment marks based on film thickness variationADVANCED MICRO DEVICES INC·Filed 2001·Granted May 7, 2002·102 cites·28 claims
- 0394US6774998B1Method and apparatus for identifying misregistration in a complimentary phase shift mask processADVANCED MICRO DEVICES INC·Filed 2001·Granted Aug 10, 2004·59 cites·61 claims
- 0493US6859746B1Methods of using adaptive sampling techniques based upon categorization of process variations, and system for performing sameADVANCED MICRO DEVICES INC·Filed 2003·Granted Feb 22, 2005·74 cites·24 claims
- 0593US6716646B1Method and apparatus for performing overlay measurements using scatterometryADVANCED MICRO DEVICES INC·Filed 2001·Granted Apr 6, 2004·69 cites·12 claims
- 0693US6614540B1Method and apparatus for determining feature characteristics using scatterometryADVANCED MICRO DEVICES INC·Filed 2001·Granted Sep 2, 2003·52 cites·70 claims
- 0791US6433871B1Method of using scatterometry measurements to determine and control gate electrode profilesADVANCED MICRON DEVICES INC·Filed 2001·Granted Aug 13, 2002·56 cites·77 claims
- 0888US6597447B1Method and apparatus for periodic correction of metrology dataADVANCED MICRO DEVICES INC·Filed 2001·Granted Jul 22, 2003·32 cites·31 claims
- 0987US6836691B1Method and apparatus for filtering metrology data based on collection purposeADVANCED MICRO DEVICES INC·Filed 2003·Granted Dec 28, 2004·43 cites·20 claims
- 1087US6618149B1Method of identifying film stacks based upon optical propertiesADVANCED MICRO DEVICES INC·Filed 2001·Granted Sep 9, 2003·31 cites·15 claims
- 1186US6529282B1Method of controlling photolithography processes based upon scatterometric measurements of photoresist thickness, and system for accomplishing sameADVANCED MICRO DEVICES INC·Filed 2001·Granted Mar 4, 2003·26 cites·74 claims
- 1284US6524163B1Method and apparatus for controlling a polishing process based on scatterometry derived film thickness variationADVANCED MICRO DEVICES INC·Filed 2001·Granted Feb 25, 2003·25 cites·20 claims
- 1383US6479200B1Method of controlling stepper process parameters based upon scatterometric measurements of DICD featuresADVANCED MICRO DEVICES INC·Filed 2001·Granted Nov 12, 2002·22 cites·46 claims
- 1482US7869894B2Method and system for advanced process control using a combination of weighted relative bias valuesADVANCED MICRO DEVICES INC·Filed 2006·Granted Jan 11, 2011·9 cites·21 claims
- 1581US7330800B1Method and apparatus for selecting sites for samplingADVANCED MICRO DEVICES INC·Filed 2006·Granted Feb 12, 2008·10 cites·24 claims
- 1679US6451700B1Method and apparatus for measuring planarity of a polished layerADVANCED MICRO DEVICES INC·Filed 2001·Granted Sep 17, 2002·22 cites·16 claims
- 1778US7738986B2Method and apparatus for compensating metrology data for site bias prior to filteringGLOBALFOUNDRIES INC·Filed 2006·Granted Jun 15, 2010·4 cites·17 claims
- 1878US6660543B1Method of measuring implant profiles using scatterometric techniques wherein dispersion coefficients are varied based upon depthADVANCED MICRO DEVICES INC·Filed 2002·Granted Dec 9, 2003·22 cites·52 claims
- 1976US6643008B1Method of detecting degradation in photolithography processes based upon scatterometric measurements of grating structures, and a device comprising such structuresADVANCED MICRO DEVICES INC·Filed 2002·Granted Nov 4, 2003·18 cites·46 claims
- 2074US8149384B2Method and apparatus for extracting dose and focus from critical dimension dataCHAUHAN SIDDHARTH·Filed 2007·Granted Apr 3, 2012·7 cites·20 claims
- 2174US7565254B2Method and apparatus for metrology sampling using combination sampling rulesADVANCED MICRO DEVICES INC·Filed 2006·Granted Jul 21, 2009·7 cites·26 claims
- 2274US6458610B1Method and apparatus for optical film stack fault detectionADVANCED MICRO DEVICES INC·Filed 2001·Granted Oct 1, 2002·20 cites·43 claims
- 2372US6746882B1Method of correcting non-linearity of metrology tools, and system for performing sameADVANCED MICRO DEVICES INC·Filed 2002·Granted Jun 8, 2004·11 cites·41 claims
- 2469US7831324B2Method and system for randomizing wafers in a complex process lineGLOBALFOUNDRIES INC·Filed 2007·Granted Nov 9, 2010·5 cites·20 claims
- 2569US6972853B1Methods of calibrating and controlling stepper exposure processes and tools, and system for accomplishing sameADVANCED MICRO DEVICES INC·Filed 2002·Granted Dec 6, 2005·12 cites·51 claims
- 2669US6660542B1Method of controlling stepper process parameters based upon optical properties of incoming process layers, and system for accomplishing sameADVANCED MICRO DEVICES INC·Filed 2001·Granted Dec 9, 2003·12 cites·28 claims
- 2768US6697153B1Method and apparatus for analyzing line structuresADVANCED MICRO DEVICES INC·Filed 2002·Granted Feb 24, 2004·11 cites·34 claims
- 2868US6582863B1Method of controlling photolithography processes based upon scatterometric measurements of sub-nominal grating structuresADVANCED MICRO DEVICES INC·Filed 2001·Granted Jun 24, 2003·9 cites·84 claims
- 2967US6933158B1Method of monitoring anneal processes using scatterometry, and system for performing sameADVANCED MICRO DEVICES INC·Filed 2002·Granted Aug 23, 2005·11 cites·84 claims
- 3066US6562635B1Method of controlling metal etch processes, and system for accomplishing sameADVANCED MICRO DEVICES INC·Filed 2002·Granted May 13, 2003·10 cites·57 claims
- 3165US6989900B1Method of measuring implant profiles using scatterometric techniquesADVANCED MICRO DEVICES INC·Filed 2001·Granted Jan 24, 2006·5 cites·36 claims
- 3265US6980300B1Method and apparatus for generating a polishing process endpoint signal using scatterometryADVANCED MICRO DEVICES INC·Filed 2001·Granted Dec 27, 2005·10 cites·24 claims
- 3365US6927080B1Structures for analyzing electromigration, and methods of using sameADVANCED MICRO DEVICES INC·Filed 2002·Granted Aug 9, 2005·10 cites·65 claims
- 3464US6808946B1Method of using critical dimension measurements to control stepper process parametersADVANCED MICRO DEVICES INC·Filed 2002·Granted Oct 26, 2004·7 cites·49 claims
- 3562US7840298B2Method and system for advanced process control using measurement uncertainty as control inputADVANCED MICRO DEVICES INC·Filed 2006·Granted Nov 23, 2010·5 cites·22 claims
- 3661US6785009B1Method of using high yielding spectra scatterometry measurements to control semiconductor manufacturing processes, and systems for accomplishing sameADVANCED MICRO DEVICES INC·Filed 2002·Granted Aug 31, 2004·8 cites·25 claims
- 3760US7925369B2Method and apparatus for optimizing models for extracting dose and focus from critical dimensionGLOBALFOUNDRIES INC·Filed 2007·Granted Apr 12, 2011·1 cites·23 claims
- 3859US6881594B1Method of using scatterometry for analysis of electromigration, and structures for performing sameADVANCED MICRO DEVICES INC·Filed 2002·Granted Apr 19, 2005·2 cites·54 claims
- 3957US6602723B1Method of integrating scatterometry metrology structures directly into die designADVANCED MICRO DEVICES INC·Filed 2001·Granted Aug 5, 2003·5 cites·27 claims
- 4056US6968252B1Method and apparatus for dispatching based on metrology tool performanceADVANCED MICRO DEVICES INC·Filed 2003·Granted Nov 22, 2005·5 cites·17 claims
- 4156US6790570B1Method of using scatterometry measurements to control stepper process parametersADVANCED MICRO DEVICES INC·Filed 2001·Granted Sep 14, 2004·4 cites·98 claims
- 4245US6623994B1Method for calibrating optical-based metrology toolsADVANCED MICRO DEVICES INC·Filed 2002·Granted Sep 23, 2003·2 cites·26 claims
- 4339US10289109B2Methods of error detection in fabrication processesGLOBALFOUNDRIES INC·Filed 2016·Granted May 14, 2019·0 cites·20 claims
- 4439US10241502B2Methods of error detection in fabrication processesGLOBALFOUNDRIES INC·Filed 2016·Granted Mar 26, 2019·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →