Inventor · disambiguated record
Hematha K. Wickramasinghe
Also filed as: WICKRAMASINGHE HEMATHA K · WICKRAMASINGHE HEMATHA KUMAR
7 granted patents·4 pending applications·61 citations·filing 2001–2012
81Inventor score
Top patents by PatentIndex Score
11 records- 0196US7883832B2Method and apparatus for direct referencing of top surface of workpiece during imprint lithographyIBM·Filed 2005·Granted Feb 8, 2011·42 cites·10 claims
- 0284US7776709B2Cut-and-paste imprint lithographic mold and method thereforIBM·Filed 2007·Granted Aug 17, 2010·8 cites·16 claims
- 0368US7130038B2Method and apparatus for optical film measurements in a controlled environmentIBM·Filed 2005·Granted Oct 31, 2006·1 cites·18 claims
- 0466US6967715B2Method and apparatus for optical film measurements in a controlled environmentIBM·Filed 2002·Granted Nov 22, 2005·10 cites·19 claims
- 0554US2008180646A1Imprint reference template for multilayer or multipattern registration and method thereforIBM·Filed 2008·Application pending·0 cites
- 0649US2012321740A1Pneumatic method and apparatus for nano imprint lithography having a conforming maskCOLBURN MATTHEW E·Filed 2012·Application pending·0 cites
- 0748US2006157898A1Imprint reference template for multilayer or multipattern registration and method thereforIBM·Filed 2005·Application pending·0 cites
- 0845US7344955B2Cut-and-paste imprint lithographic mold and method thereforIBM·Filed 2004·Granted Mar 18, 2008·0 cites·7 claims
- 0943US8721952B2Pneumatic method and apparatus for nano imprint lithography having a conforming maskCOLBURN MATTHEW E·Filed 2004·Granted May 13, 2014·0 cites·19 claims
- 1040US2006147820A1Phase contrast alignment method and apparatus for nano imprint lithographyIBM·Filed 2005·Application pending·0 cites
- 1136US6738142B2Integrated wafer cassette metrology assemblyIBM·Filed 2001·Granted May 18, 2004·0 cites·19 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →