Individual holder
COLBURN MATTHEW E
US·7 granted patents·1 pending application·7 citations·filing 2004–2012
Individually held — no corporate assignee on record.
Top patents by PatentIndex Score
8 records- 0178US8491987B2Selectively coated self-aligned maskCOLBURN MATTHEW E·Filed 2008·Granted Jul 23, 2013·4 cites·6 claims
- 0270US8137997B2Method and system for tone inverting of residual layer tolerant imprint lithographyCOLBURN MATTHEW E·Filed 2010·Granted Mar 20, 2012·1 cites·18 claims
- 0368US8901741B2Interconnect structures with engineered dielectrics with nanocolumnar porosityCOLBURN MATTHEW E·Filed 2012·Granted Dec 2, 2014·2 cites·11 claims
- 0460US8609238B2Method and material for a thermally crosslinkable random copolymerCOLBURN MATTHEW E·Filed 2011·Granted Dec 17, 2013·0 cites·7 claims
- 0554US8137996B2Method and system for tone inverting of residual layer tolerant imprint lithographyCOLBURN MATTHEW E·Filed 2010·Granted Mar 20, 2012·0 cites·14 claims
- 0653US8338952B2Interconnect structures with ternary patterned features generated from two lithographic processesCOLBURN MATTHEW E·Filed 2009·Granted Dec 25, 2012·0 cites·5 claims
- 0749US2012321740A1Pneumatic method and apparatus for nano imprint lithography having a conforming maskCOLBURN MATTHEW E·Filed 2012·Application pending·0 cites
- 0843US8721952B2Pneumatic method and apparatus for nano imprint lithography having a conforming maskCOLBURN MATTHEW E·Filed 2004·Granted May 13, 2014·0 cites·19 claims
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