Inventor · disambiguated record
Yoichi Uchimaki
Also filed as: UCHIMAKI YOICHI
2 granted patents·4 pending applications·85 citations·filing 2002–2004
68Inventor score
Files withHITACHI HIGH TECH CORP2
Top patents by PatentIndex Score
6 records- 0187US6758647B2System for producing wafersHITACHI HIGH TECH CORP·Filed 2002·Granted Jul 6, 2004·51 cites·7 claims
- 0281US6979168B2Method and apparatus for transferring substrateHITACHI HIGH TECH CORP·Filed 2002·Granted Dec 27, 2005·34 cites·4 claims
- 0337US2004166676A1Method and apparatus for forming damascene structure, and damascene structureFiled 2004·Application pending·0 cites
- 0437US2004166445A1Method and apparatus for forming damascene structure, and damascene structureFiled 2004·Application pending·0 cites
- 0537US2004146379A1System and method of producing waferFiled 2003·Application pending·0 cites
- 0636US2004053498A1Method and apparatus for forming damascene structure, and damascene structureFiled 2003·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →