Inventor · disambiguated record
Sang-Oh Park
Also filed as: PARK SANG O · PARK SANG OH
27 granted patents·13 pending applications·297 citations·filing 1996–2024
96Inventor score
Top patents by PatentIndex Score
40 records- 0188US9087729B2Semiconductor devices including unitary supportsSAMSUNG ELECTRONICS CO LTD·Filed 2014·Granted Jul 21, 2015·12 cites·20 claims
- 0286US6232228B1Method of manufacturing semiconductor devices, etching composition for manufacturing semiconductor devices, and semiconductor devices made using the methodSAMSUNG ELECTRONICS CO LTD·Filed 1999·Granted May 15, 2001·77 cites·28 claims
- 0378US6436809B1Method of manufacturing semiconductor devices, etching compositions for manufacturing semiconductor devices, and semiconductor devices made using this methodSAMSUNG ELECTRONICS CO LTD·Filed 2000·Granted Aug 20, 2002·19 cites·13 claims
- 0477US7100306B2Wafer guides for processing semiconductor substratesSAMSUNG ELECTRONICS CO LTD·Filed 2005·Granted Sep 5, 2006·4 cites·10 claims
- 0577US6959823B2Wafer guides for processing semiconductor substratesSAMSUNG ELECTRONICS CO LTD·Filed 2003·Granted Nov 1, 2005·15 cites·5 claims
- 0669US10317798B2Method of forming pattern of semiconductor deviceSAMSUNG ELECTRONICS CO LTD·Filed 2017·Granted Jun 11, 2019·1 cites·20 claims
- 0769US6140233AMethod of manufacturing semiconductor devices, etching compositions for manufacturing semiconductor devices, and semiconductor devices therebySAMSUNG ELECTRONICS CO LTD·Filed 1998·Granted Oct 31, 2000·32 cites·32 claims
- 0868US6655042B2System and method for drying semiconductor substrateSAMSUNG ELECTRONICS CO LTD·Filed 2002·Granted Dec 2, 2003·12 cites·35 claims
- 0966US7348190B2Method of detecting a defect in a semiconductor deviceSAMSUNG ELECTRONICS CO LTD·Filed 2005·Granted Mar 25, 2008·3 cites·20 claims
- 1062US9962240B2Dental implant fixturePARK SANG OH·Filed 2009·Granted May 8, 2018·3 cites·17 claims
- 1162US7386944B2Method and apparatus for drying a wafer, and an apparatus for cleaning and drying a waferSAMSUNG ELECTRONICS CO LTD·Filed 2004·Granted Jun 17, 2008·9 cites·19 claims
- 1261US11764180B2Semiconductor device including base pillar, connection pad, and insulation layer disposed on a substrateSAMSUNG ELECTRONICS CO LTD·Filed 2021·Granted Sep 19, 2023·0 cites·20 claims
- 1360US5883060ACleaning compositions for wafers used in semiconductor devicesSAMSUNG ELECTRONICS CO LTD·Filed 1998·Granted Mar 16, 1999·21 cites·7 claims
- 1459US7255115B2Apparatus for cleaning semiconductor wafersSAMSUNG ELECTRONICS CO LTD·Filed 2003·Granted Aug 14, 2007·9 cites·17 claims
- 1556US11075183B2Semiconductor chip and semiconductor package including the sameSAMSUNG ELECTRONICS CO LTD·Filed 2019·Granted Jul 27, 2021·0 cites·20 claims
- 1655US7223721B2Resist and etching by-product removing composition and resist removing method using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2003·Granted May 29, 2007·1 cites·18 claims
- 1755US6905570B2Apparatus for manufacturing integrated circuit deviceSAMSUNG ELECTRONICS CO LTD·Filed 2003·Granted Jun 14, 2005·5 cites·19 claims
- 1855US6713440B2Resist and etching by-product removing composition and resist removing method using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2002·Granted Mar 30, 2004·3 cites·21 claims
- 1955US5983704AMethod of measuring and analyzing contamination particles generated during the manufacture of semiconductor devicesSAMSUNG ELECTRONICS CO LTD·Filed 1998·Granted Nov 16, 1999·18 cites·4 claims
- 2054US5782984AMethod for cleaning an integrated circuit device using an aqueous cleaning compositionSAMSUNG ELECTRONICS CO LTD·Filed 1998·Granted Jul 21, 1998·16 cites·9 claims
- 2154US2009120459A1Apparatus and method for cleaning semiconductor substratesYI HUN-JUNG·Filed 2009·Application pending·0 cites
- 2253US2008216347A1Apparatus and method for drying semiconductor substratesYI HUN-JUNG·Filed 2008·Application pending·0 cites
- 2351US2006260149A1Wafer guides for processing semiconductor substratesSAMSUNG ELECTRONICS CO LTD·Filed 2006·Application pending·0 cites
- 2449US2024280136A1Ball jointILJIN CO LTD·Filed 2024·Application pending·0 cites
- 2547US7520068B2Apparatus and method for drying semiconductor substratesSAMSUNG ELECTRONICS CO LTD·Filed 2004·Granted Apr 21, 2009·1 cites·27 claims
- 2646US6071827AMethod for manufacturing semiconductor devicesSAMSUNG ELECTRONICS CO LTD·Filed 1998·Granted Jun 6, 2000·12 cites·14 claims
- 2744US6232239B1Method for cleaning contact holes in a semiconductor deviceSAMSUNG ELECTRONICS CO LTD·Filed 1998·Granted May 15, 2001·11 cites·28 claims
- 2844US5880355AApparatus for measuring contamination particles during the manufacture of semiconductor devicesSAMSUNG ELECTRONICS CO LTD·Filed 1996·Granted Mar 9, 1999·11 cites·6 claims
- 2944US2007169795A1Apparatus for cleaning substratesYI HUN-JUNG·Filed 2007·Application pending·0 cites
- 3043US2007017117A1Apparatus for drying semiconductor substrateSAMSUNG ELECTRONICS CO LTD·Filed 2006·Application pending·0 cites
- 3143US2005039776A1Apparatus and method for cleaning semiconductor substratesSAMSUNG ELECTRONICS CO LTD·Filed 2004·Application pending·0 cites
- 3243US2004226186A1Apparatus for drying semiconductor substrates using azeotrope effect and drying method using the apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2004·Application pending·0 cites
- 3341US2006237033A1Cleaning apparatus and methodSAMSUNG ELECTRONICS CO LTD·Filed 2006·Application pending·0 cites
- 3441US2004010932A1Apparatus for drying semiconductor substrates using azeotrope effect and drying method using the apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2003·Application pending·0 cites
- 3539US2005045208A1Apparatus and method for cleaning semiconductor substratesFiled 2004·Application pending·0 cites
- 3638US9855119B2Dental implant fixtureYOON JI HOON·Filed 2010·Granted Jan 2, 2018·0 cites·6 claims
- 3738US2001006246A1Method of manufacturing semiconductor devices, etching composition for manufacturing semiconductor devices, and semiconductor devices made using the methodFiled 2001·Application pending·0 cites
- 3836US2006086373A1Apparatus and method for drying substrates used to manufacture semiconductor devicesPARK SANG-OH·Filed 2005·Application pending·0 cites
- 3932US6037269AEtching methods of silicon nitride films employed in microelectronic devicesSAMSUNG ELECTRONICS CO LTD·Filed 1999·Granted Mar 14, 2000·2 cites·8 claims
- 4022US9722391B2Laser systemHAN YOUNG GEUN·Filed 2011·Granted Aug 1, 2017·0 cites·16 claims
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