Assignee
YI HUN-JUNG
0 granted patents·5 pending applications·0 citations·filing 2002–2009
Top patents by PatentIndex Score
5 records- 0154US2009120459A1Apparatus and method for cleaning semiconductor substratesYI HUN-JUNG·Filed 2009·Application pending·0 cites
- 0253US2008216347A1Apparatus and method for drying semiconductor substratesYI HUN-JUNG·Filed 2008·Application pending·0 cites
- 0344US2007169795A1Apparatus for cleaning substratesYI HUN-JUNG·Filed 2007·Application pending·0 cites
- 0441US2007102023A1Apparatus for treating substrates with phosphoric acid solution and method for regenerating the phosphoric acid solution employed thereinYI HUN-JUNG·Filed 2006·Application pending·0 cites
- 0535US2003085198A1Method of detecting etching process end point in semiconductor fabricating equipment and detector thereforYI HUN JUNG·Filed 2002·Application pending·0 cites
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