Inventor · disambiguated record
Hari Soundararajan
Also filed as: SOUNDARARAJAN HARI · SOUNDARARAJAN HARI N
21 granted patents·16 pending applications·16 citations·filing 2018–2025
91Inventor score
Files withAPPLIED MATERIALS INC37
Top patents by PatentIndex Score
37 records- 0197US11446711B2Steam treatment stations for chemical mechanical polishing systemAPPLIED MATERIALS INC·Filed 2020·Granted Sep 20, 2022·8 cites·11 claims
- 0295US11633833B2Use of steam for pre-heating of CMP componentsAPPLIED MATERIALS INC·Filed 2020·Granted Apr 25, 2023·3 cites·20 claims
- 0388US12318882B2Apparatus and method for CMP temperature controlAPPLIED MATERIALS INC·Filed 2023·Granted Jun 3, 2025·0 cites·9 claims
- 0485US12459011B2Steam treatment stations for chemical mechanical polishing systemAPPLIED MATERIALS INC·Filed 2024·Granted Nov 4, 2025·0 cites·14 claims
- 0584US2024157504A1Apparatus and method for cmp temperature controlAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 0684US2024025006A1Temperature and slurry flow rate control in cmpAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 0783US12296427B2Apparatus and method for CMP temperature controlAPPLIED MATERIALS INC·Filed 2020·Granted May 13, 2025·1 cites·12 claims
- 0883US11728185B2Steam-assisted single substrate cleaning process and apparatusAPPLIED MATERIALS INC·Filed 2021·Granted Aug 15, 2023·1 cites·20 claims
- 0983US2025269486A1Apparatus and method for cmp temperature controlAPPLIED MATERIALS INC·Filed 2025·Application pending·0 cites
- 1082US11897079B2Low-temperature metal CMP for minimizing dishing and corrosion, and improving pad asperityAPPLIED MATERIALS INC·Filed 2020·Granted Feb 13, 2024·1 cites·18 claims
- 1181US11597052B2Temperature control of chemical mechanical polishingAPPLIED MATERIALS INC·Filed 2019·Granted Mar 7, 2023·2 cites·17 claims
- 1281US2023415297A1Control of steam generation for chemical mechanical polishingAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 1379US12434347B2Method for CMP temperature controlAPPLIED MATERIALS INC·Filed 2023·Granted Oct 7, 2025·0 cites·13 claims
- 1479US2023029290A1Temperature control of chemical mechanical polishingAPPLIED MATERIALS INC·Filed 2022·Application pending·0 cites
- 1578US12030093B2Steam treatment stations for chemical mechanical polishing systemAPPLIED MATERIALS INC·Filed 2022·Granted Jul 9, 2024·0 cites·15 claims
- 1677US12106976B2Steam-assisted single substrate cleaning process and apparatusAPPLIED MATERIALS INC·Filed 2023·Granted Oct 1, 2024·0 cites·19 claims
- 1777US11919123B2Apparatus and method for CMP temperature controlAPPLIED MATERIALS INC·Filed 2021·Granted Mar 5, 2024·0 cites·19 claims
- 1876US2025205847A1Method for cmp temperature controlAPPLIED MATERIALS INC·Filed 2025·Application pending·0 cites
- 1975US12290896B2Apparatus and method for CMP temperature controlAPPLIED MATERIALS INC·Filed 2020·Granted May 6, 2025·0 cites·12 claims
- 2075US11826872B2Temperature and slurry flow rate control in CMPAPPLIED MATERIALS INC·Filed 2021·Granted Nov 28, 2023·0 cites·23 claims
- 2175US2025108476A1Temperature control of chemical mechanical polishingAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 2275US2023256562A1Use of steam for pre-heating of cmp componentsAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 2372US11833637B2Control of steam generation for chemical mechanical polishingAPPLIED MATERIALS INC·Filed 2021·Granted Dec 5, 2023·0 cites·20 claims
- 2472US2024066660A1Low-temperature metal cmp for minimizing dishing and corrosion, and improving pad asperityAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 2571US11697187B2Temperature-based assymetry correction during CMP and nozzle for media dispensingAPPLIED MATERIALS INC·Filed 2020·Granted Jul 11, 2023·0 cites·14 claims
- 2671US2023356351A1Chemical mechanical polishing temperature scanning apparatus for temperature controlAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 2769US2023249225A1Steam cleaning of cmp componentsAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 2865US12392427B2Insulated fluid lines in chemical mechanical polishingAPPLIED MATERIALS INC·Filed 2022·Granted Aug 19, 2025·0 cites·14 claims
- 2965US11752589B2Chemical mechanical polishing temperature scanning apparatus for temperature controlAPPLIED MATERIALS INC·Filed 2020·Granted Sep 12, 2023·0 cites·19 claims
- 3064US11628478B2Steam cleaning of CMP componentsAPPLIED MATERIALS INC·Filed 2020·Granted Apr 18, 2023·0 cites·10 claims
- 3160US11865671B2Temperature-based in-situ edge assymetry correction during CMPAPPLIED MATERIALS INC·Filed 2020·Granted Jan 9, 2024·0 cites·20 claims
- 3256US2021046603A1Slurry temperature control by mixing at dispensingAPPLIED MATERIALS INC·Filed 2020·Application pending·0 cites
- 3354US12214468B2Temperature control of chemical mechanical polishingAPPLIED MATERIALS INC·Filed 2018·Granted Feb 4, 2025·0 cites·11 claims
- 3454US2022355440A1Hot water generation method for chemical mechanical polishingAPPLIED MATERIALS INC·Filed 2022·Application pending·0 cites
- 3552US2022359219A1Chemical Mechanical Polishing With Die-Based ModificationAPPLIED MATERIALS INC·Filed 2022·Application pending·0 cites
- 3649US2023054165A1Point-of-use ultrasonic homogenizer for cmp slurry agglomeration reductionAPPLIED MATERIALS INC·Filed 2021·Application pending·0 cites
- 3747US2020406310A1Steam generation for chemical mechanical polishingAPPLIED MATERIALS INC·Filed 2020·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →