Inventor · disambiguated record
Weiyi Luo
Also filed as: LUO WEIYI
4 granted patents·2 pending applications·26 citations·filing 2007–2024
74Inventor score
Top patents by PatentIndex Score
6 records- 0191US12211709B2Systems and methods for metastable activated radical selective strip and etch using dual plenum showerheadLAM RES CORP·Filed 2023·Granted Jan 28, 2025·1 cites·18 claims
- 0291US11694911B2Systems and methods for metastable activated radical selective strip and etch using dual plenum showerheadLAM RES CORP·Filed 2017·Granted Jul 4, 2023·7 cites·35 claims
- 0384US7789993B2Internal balanced coil for inductively coupled high density plasma processing chamberAPPLIED MATERIALS INC·Filed 2007·Granted Sep 7, 2010·8 cites·6 claims
- 0484US7572647B2Internal balanced coil for inductively coupled high density plasma processing chamberAPPLIED MATERIALS INC·Filed 2007·Granted Aug 11, 2009·10 cites·7 claims
- 0568US2024363311A1Rf power compensation to reduce deposition or etch rate changes in response to substrate bulk resistivity variationsLAM RES CORP·Filed 2024·Application pending·0 cites
- 0653US2008188090A1Internal balanced coil for inductively coupled high density plasma processing chamberAPPLIED MATERIALS INC·Filed 2007·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →