Inventor · disambiguated record
Henrikus Herman Marie Cox
Also filed as: COX HENRIKUS HERMAN · COX HENRIKUS HERMAN MARIE
71 granted patents·1,027 citations·filing 2003–2019
99Inventor score
Files withASML NETHERLANDS BV55STREEFKERK BOB5COX HENRIKUS HERMAN MARIE3KEMPER NICOLAAS RUDOLF3BUTLER HANS1
Top patents by PatentIndex Score
71 records- 0199US7352434B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Apr 1, 2008·178 cites·43 claims
- 0298US7936444B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2008·Granted May 3, 2011·35 cites·35 claims
- 0398US7710540B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2007·Granted May 4, 2010·94 cites·24 claims
- 0498US7483120B2Displacement measurement system, lithographic apparatus, displacement measurement method and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Jan 27, 2009·121 cites·23 claims
- 0598US7119874B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Oct 10, 2006·143 cites·48 claims
- 0697US8031325B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2010·Granted Oct 4, 2011·13 cites·20 claims
- 0797US7671963B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted Mar 2, 2010·35 cites·19 claims
- 0896US9798246B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2016·Granted Oct 24, 2017·5 cites·22 claims
- 0996US7701550B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Apr 20, 2010·45 cites·42 claims
- 1096US7602470B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted Oct 13, 2009·20 cites·21 claims
- 1193US9488923B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2014·Granted Nov 8, 2016·4 cites·20 claims
- 1292US9477160B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2015·Granted Oct 25, 2016·3 cites·20 claims
- 1390US8446563B2Lithographic apparatus and device manufacturing methodKEMPER NICOLAAS RUDOLF·Filed 2009·Granted May 21, 2013·6 cites·24 claims
- 1490US7292317B2Lithographic apparatus and device manufacturing method utilizing substrate stage compensatingASML NETHERLANDS BV·Filed 2005·Granted Nov 6, 2007·13 cites·11 claims
- 1589US7782446B2Stage system and lithographic apparatus comprising such stage systemASML NETHERLANDS BV·Filed 2007·Granted Aug 24, 2010·13 cites·31 claims
- 1687US10222707B2Lithographic apparatus and a device manufacturing methodASML NETHERLANDS BV·Filed 2016·Granted Mar 5, 2019·3 cites·20 claims
- 1787US9229339B2Positioning system, a lithographic apparatus and a method for positional controlBUTLER HANS·Filed 2011·Granted Jan 5, 2016·4 cites·9 claims
- 1887US7417711B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Aug 26, 2008·8 cites·11 claims
- 1987US7145269B2Lithographic apparatus, Lorentz actuator, and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Dec 5, 2006·30 cites·16 claims
- 2085US6906786B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2003·Granted Jun 14, 2005·23 cites·27 claims
- 2183US7330238B2Lithographic apparatus, immersion projection apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted Feb 12, 2008·6 cites·19 claims
- 2281US7170583B2Lithographic apparatus immersion damage controlASML NETHERLANDS BV·Filed 2005·Granted Jan 30, 2007·8 cites·25 claims
- 2380US7486381B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Feb 3, 2009·12 cites·25 claims
- 2480US7359032B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Apr 15, 2008·17 cites·18 claims
- 2579US8947640B2Positioning device, lithographic apparatus, positioning method and device manufacturing methodLAFARRE RAYMOND WILHELMUS LOUIS·Filed 2012·Granted Feb 3, 2015·4 cites·20 claims
- 2677US10599054B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2019·Granted Mar 24, 2020·0 cites·20 claims
- 2777US9977341B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2014·Granted May 22, 2018·2 cites·15 claims
- 2876US7468589B2Lithographic apparatus having a controlled motor, and motor control system and methodASML NETHERLANDS BV·Filed 2006·Granted Dec 23, 2008·10 cites·19 claims
- 2975US7295283B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Nov 13, 2007·16 cites·28 claims
- 3073US8553201B2Lithographic apparatus and device manufacturing methodSTREEFKERK BOB·Filed 2008·Granted Oct 8, 2013·2 cites·20 claims
- 3173US8102513B2Method for positioning an object by an electromagnetic motor, stage apparatus and lithographic apparatusCOX HENRIKUS HERMAN MARIE·Filed 2008·Granted Jan 24, 2012·3 cites·15 claims
- 3272US10705439B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2018·Granted Jul 7, 2020·0 cites·20 claims
- 3372US7205741B2Planar motor initialization method, planar motor, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Apr 17, 2007·27 cites·10 claims
- 3471US10331047B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2017·Granted Jun 25, 2019·0 cites·20 claims
- 3571US9671702B2Positioning system, a lithographic apparatus and a method for positional controlASML NETHERLANDS BV·Filed 2015·Granted Jun 6, 2017·1 cites·8 claims
- 3671US7256866B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Aug 14, 2007·11 cites·18 claims
- 3771US7193722B2Lithographic apparatus with disturbance correction system and device manufacturing methodASML NETHERLANDS BV·Filed 2003·Granted Mar 20, 2007·12 cites·28 claims
- 3870US10466595B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2017·Granted Nov 5, 2019·0 cites·20 claims
- 3970US7456935B2Lithographic apparatus and device manufacturing method utilizing a positioning device for positioning an object tableASML NETHERLANDS BV·Filed 2005·Granted Nov 25, 2008·3 cites·20 claims
- 4069US9904185B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2016·Granted Feb 27, 2018·0 cites·20 claims
- 4169US7245047B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Jul 17, 2007·14 cites·21 claims
- 4268US8368868B2Lithographic apparatus with gas pressure means for controlling a planar position of a patterning device contactlessASML NETHERLANDS BV·Filed 2009·Granted Feb 5, 2013·2 cites·14 claims
- 4368US7016019B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2003·Granted Mar 21, 2006·10 cites·52 claims
- 4467US7239369B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2003·Granted Jul 3, 2007·7 cites·21 claims
- 4567US7019816B2Lithographic apparatus, device manufacturing method, and device manufactured therebyASML NETHERLANDS BV·Filed 2003·Granted Mar 28, 2006·8 cites·13 claims
- 4666US9507278B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2015·Granted Nov 29, 2016·0 cites·20 claims
- 4765US9746788B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2016·Granted Aug 29, 2017·0 cites·20 claims
- 4865US7327437B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Feb 5, 2008·10 cites·27 claims
- 4964US7167234B2Actuator assembly and lithographic apparatus comprising such an actuator assemblyASML NETHERLANDS BV·Filed 2004·Granted Jan 23, 2007·7 cites·17 claims
- 5064US7005823B2Positioning system and positioning methodASML NETHERLANDS BV·Filed 2004·Granted Feb 28, 2006·9 cites·16 claims
Showing the top 50 of 71 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →