Inventor · disambiguated record
Sang-Kap Kim
Also filed as: KIM SANG-KAP
4 granted patents·3 pending applications·31 citations·filing 2000–2004
73Inventor score
Files withSAMSUNG ELECTRONICS CO LTD6
Top patents by PatentIndex Score
7 records- 0174US6992270B2Wafer bake system and method for operating the sameSAMSUNG ELECTRONICS CO LTD·Filed 2004·Granted Jan 31, 2006·16 cites·9 claims
- 0270US6613487B1Pre-alignment system of exposure apparatus having wafer cooling means and exposure method using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2000·Granted Sep 2, 2003·10 cites·9 claims
- 0347US7268853B2Exposing systems providing post exposure baking and related methodsSAMSUNG ELECTRONICS CO LTD·Filed 2004·Granted Sep 11, 2007·5 cites·68 claims
- 0440US6737206B2Pre-alignment system of exposure apparatus having wafer cooling means and exposure method using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2003·Granted May 18, 2004·0 cites·6 claims
- 0539US2004256094A1Baking system having a heat pipeSAMSUNG ELECTRONICS CO LTD·Filed 2004·Application pending·0 cites
- 0638US2004244945A1Cooling apparatus for wafer baking plateSAMSUNG ELECTRONICS CO LTD·Filed 2004·Application pending·0 cites
- 0738US2004179337A1Baking system including a cooling apparatus manufactured using a heatpipeFiled 2004·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →