Inventor · disambiguated record
Miguel S. Fung
Also filed as: FUNG MIGUEL · FUNG MIGUEL S
2 granted patents·4 pending applications·32 citations·filing 2003–2024
55Inventor score
Files withAPPLIED MATERIALS INC6
Top patents by PatentIndex Score
6 records- 0186US6927178B2Nitrogen-free dielectric anti-reflective coating and hardmaskAPPLIED MATERIALS INC·Filed 2003·Granted Aug 9, 2005·32 cites·20 claims
- 0258US2025149373A1Soft touch coating materials for substrate handlingAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 0354US2024145217A1Method for forming highly uniform dielectric filmAPPLIED MATERIALS INC·Filed 2022·Application pending·0 cites
- 0454US2024332009A1Ion implantation for reduced roughness of silicon nitrideAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 0544US11145504B2Method of forming film stacks with reduced defectsAPPLIED MATERIALS INC·Filed 2019·Granted Oct 12, 2021·0 cites·18 claims
- 0634US2017084448A1Low temperature conformal deposition of silicon nitride on high aspect ratio structuresAPPLIED MATERIALS INC·Filed 2016·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →