Inventor · disambiguated record
Robert Boyd Finlay
Also filed as: FINLAY ROBERT · FINLAY ROBERT B · FINLAY ROBERT BOYD
4 granted patents·2 pending applications·19 citations·filing 2003–2018
71Inventor score
Technology areasH10P
Top patents by PatentIndex Score
6 records- 0179US10109046B2Methods of detecting faults in real-time for semiconductor wafersGLOBALFOUNDRIES INC·Filed 2016·Granted Oct 23, 2018·3 cites·20 claims
- 0278US10996564B2Uniformity control of metal-based photoresistsGLOBALFOUNDRIES US INC·Filed 2018·Granted May 4, 2021·4 cites·8 claims
- 0370US10256126B2Gas flow process control system and method using crystal microbalance(s)GLOBALFOUNDRIES INC·Filed 2016·Granted Apr 9, 2019·3 cites·20 claims
- 0460US7247209B2Dual outlet nozzle for the combined edge bead removal and backside wash of spin coated wafersNAT SEMICONDUCTOR CORP·Filed 2003·Granted Jul 24, 2007·9 cites·17 claims
- 0530US2017268941A1Tactile sensing intrumented waferGLOBALFOUNDRIES INC·Filed 2016·Application pending·0 cites
- 0626US2019109029A1Methods, Apparatus and System for Dose Control for Semiconductor Wafer ProcessingGLOBALFOUNDRIES INC·Filed 2017·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →