Inventor · disambiguated record
Demetrius Sarigiannis
Also filed as: SARIGIANNIS DEMETRIUS
26 granted patents·12 pending applications·666 citations·filing 2002–2010
96Inventor score
Top patents by PatentIndex Score
38 records- 0198US6890596B2Deposition methodsMICRON TECHNOLOGY INC·Filed 2002·Granted May 10, 2005·418 cites·66 claims
- 0296US6844260B2Insitu post atomic layer deposition destruction of active speciesMICRON TECHNOLOGY INC·Filed 2003·Granted Jan 18, 2005·104 cites·21 claims
- 0391US6753271B2Atomic layer deposition methodsMICRON TECHNOLOGY INC·Filed 2002·Granted Jun 22, 2004·40 cites·49 claims
- 0486US7279398B2Microfeature workpiece processing apparatus and methods for controlling deposition of materials on microfeature workpiecesMICRON TECHNOLOGY INC·Filed 2006·Granted Oct 9, 2007·6 cites·12 claims
- 0585US7544388B2Methods of depositing materials over substrates, and methods of forming layers over substratesMICRON TECHNOLOGY INC·Filed 2006·Granted Jun 9, 2009·4 cites·9 claims
- 0685US7056806B2Microfeature workpiece processing apparatus and methods for controlling deposition of materials on microfeature workpiecesMICRON TECHNOLOGY INC·Filed 2003·Granted Jun 6, 2006·23 cites·31 claims
- 0783US7498057B2Deposition methodsMICRON TECHNOLOGY INC·Filed 2005·Granted Mar 3, 2009·4 cites·34 claims
- 0880US7119034B2Atomic layer deposition method of forming an oxide comprising layer on a substrateMICRON TECHNOLOGY INC·Filed 2005·Granted Oct 10, 2006·5 cites·28 claims
- 0980US6835664B1Methods of forming trenched isolation regionsMICRON TECHNOLOGY INC·Filed 2003·Granted Dec 28, 2004·18 cites·10 claims
- 1079US8235364B2Reagent dispensing apparatuses and delivery methodsSARIGIANNIS DEMETRIUS·Filed 2009·Granted Aug 7, 2012·4 cites·21 claims
- 1176US7378354B2Atomic layer deposition methodsMICRON TECHNOLOGY INC·Filed 2006·Granted May 27, 2008·3 cites·13 claims
- 1274US7368381B2Methods of forming materialsMICRON TECHNOLOGY INC·Filed 2006·Granted May 6, 2008·3 cites·22 claims
- 1374US7329615B2Atomic layer deposition method of forming an oxide comprising layer on a substrateMICRON TECHNOLOGY INC·Filed 2005·Granted Feb 12, 2008·3 cites·16 claims
- 1467US7282239B2Systems and methods for depositing material onto microfeature workpieces in reaction chambersMICRON TECHNOLOGY INC·Filed 2003·Granted Oct 16, 2007·6 cites·6 claims
- 1567US6896730B2Atomic layer deposition apparatus and methodsMICRON TECHNOLOGY INC·Filed 2002·Granted May 24, 2005·5 cites·26 claims
- 1666US7368382B2Atomic layer deposition methodsMICRON TECHNOLOGY INC·Filed 2006·Granted May 6, 2008·1 cites·10 claims
- 1763US2008029028A1Systems and methods for depositing material onto microfeature workpieces in reaction chambersMICRON TECHNOLOGY INC·Filed 2007·Application pending·0 cites
- 1862US7611971B2Method of removing residual contaminants from an environmentMICRON TECHNOLOGY INC·Filed 2006·Granted Nov 3, 2009·0 cites·20 claims
- 1961US7247561B2Method of removing residual contaminants from an environmentMICRON TECHNOLOGY INC·Filed 2003·Granted Jul 24, 2007·3 cites·11 claims
- 2060US7303991B2Atomic layer deposition methodsMICRON TECHNOLOGY INC·Filed 2004·Granted Dec 4, 2007·4 cites·11 claims
- 2160US7067438B2Atomic layer deposition method of forming an oxide comprising layer on a substrateMICRON TECHNOLOGY INC·Filed 2004·Granted Jun 27, 2006·5 cites·29 claims
- 2258US7048968B2Methods of depositing materials over substrates, and methods of forming layers over substratesMICRON TECHNOLOGY INC·Filed 2003·Granted May 23, 2006·2 cites·42 claims
- 2358US2008241386A1Atomic Layer Deposition MethodsMICRON TECHNOLOGY INC·Filed 2008·Application pending·0 cites
- 2452US7087525B2Methods of forming layers over substratesMICRON TECHNOLOGY INC·Filed 2004·Granted Aug 8, 2006·2 cites·37 claims
- 2552US2009214778A1Multiple ampoule delivery systemsSARIGIANNIS DEMETRIUS·Filed 2009·Application pending·0 cites
- 2652US2009214779A1Multiple ampoule delivery systemsSARIGIANNIS DEMETRIUS·Filed 2009·Application pending·0 cites
- 2752US2009211525A1Multiple ampoule delivery systemsSARIGIANNIS DEMETRIUS·Filed 2009·Application pending·0 cites
- 2852US2009214777A1Multiple ampoule delivery systemsSARIGIANNIS DEMETRIUS·Filed 2009·Application pending·0 cites
- 2951US2006185590A1High temperature chemical vapor deposition apparatusGEN ELECTRIC·Filed 2005·Application pending·0 cites
- 3050US7700480B2Methods of titanium depositionMICRON TECHNOLOGY INC·Filed 2007·Granted Apr 20, 2010·0 cites·4 claims
- 3149US2006185591A1High temperature chemical vapor deposition apparatusGEN ELECTRIC·Filed 2006·Application pending·0 cites
- 3248US8257497B2Insitu post atomic layer deposition destruction of active speciesSARIGIANNIS DEMETRIUS·Filed 2004·Granted Sep 4, 2012·2 cites·13 claims
- 3347US7947597B2Methods of titanium depositionMICRON TECHNOLOGY INC·Filed 2010·Granted May 24, 2011·0 cites·10 claims
- 3447US2005048792A1Atomic layer deposition apparatusFiled 2004·Application pending·0 cites
- 3545US7794787B2Methods of depositing materials over substrates, and methods of forming layers over substratesMICRON TECHNOLOGY INC·Filed 2009·Granted Sep 14, 2010·1 cites·6 claims
- 3643US2008016684A1Corrosion resistant wafer processing apparatus and method for making thereofGEN ELECTRIC·Filed 2006·Application pending·0 cites
- 3742US2005249873A1Apparatuses and methods for producing chemically reactive vapors used in manufacturing microelectronic devicesSARIGIANNIS DEMETRIUS·Filed 2004·Application pending·0 cites
- 3841US2009169781A1Low thermal conductivity low density pyrolytic boron nitride material, method of making, and articles made therefromSCHAEPKENS MARC·Filed 2007·Application pending·0 cites
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