Inventor · disambiguated record
Vince Burkhart
Also filed as: BURKHART VINCE
14 granted patents·1 pending application·119 citations·filing 1997–2023
91Inventor score
Top patents by PatentIndex Score
15 records- 0198US11264207B2Apparatuses and methods for avoiding electrical breakdown from RF terminal to adjacent non-RF terminalLAM RES CORP·Filed 2020·Granted Mar 1, 2022·8 cites·20 claims
- 0290US11469084B2High temperature RF connection with integral thermal chokeLAM RES CORP·Filed 2017·Granted Oct 11, 2022·6 cites·20 claims
- 0389US10373794B2Systems and methods for filtering radio frequencies from a signal of a thermocouple and controlling a temperature of an electrode in a plasma chamberLAM RES CORP·Filed 2015·Granted Aug 6, 2019·9 cites·19 claims
- 0487US10043636B2Apparatuses and methods for avoiding electrical breakdown from RF terminal to adjacent non-RF terminalLAM RES CORP·Filed 2016·Granted Aug 7, 2018·3 cites·21 claims
- 0585US2023420218A1Apparatuses and methods for avoiding electrical breakdown from rf terminal to adjacent non-rf terminalLAM RES CORP·Filed 2023·Application pending·0 cites
- 0682US5861086AMethod and apparatus for sputter etch conditioning a ceramic bodyAPPLIED MATERIALS INC·Filed 1997·Granted Jan 19, 1999·35 cites·21 claims
- 0779US11784027B2Apparatuses and methods for avoiding electrical breakdown from RF terminal to adjacent non-RF terminalLAM RES CORP·Filed 2022·Granted Oct 10, 2023·0 cites·20 claims
- 0873US11189452B2Systems and methods for filtering radio frequencies from a signal of a thermocouple and controlling a temperature of an electrode in a plasma chamberLAM RES CORP·Filed 2019·Granted Nov 30, 2021·1 cites·17 claims
- 0969US12283451B2Systems and methods for filtering radio frequencies from a signal of a thermocouple and controlling a temperature of an electrode in a plasma chamberLAM RES CORP·Filed 2021·Granted Apr 22, 2025·0 cites·20 claims
- 1067US10636624B2Apparatuses and methods for avoiding electrical breakdown from RF terminal to adjacent non-RF terminalLAM RES CORP·Filed 2019·Granted Apr 28, 2020·0 cites·21 claims
- 1166US6053756AInterlock safety deviceAPPLIED MATERIALS INC·Filed 1998·Granted Apr 25, 2000·32 cites·20 claims
- 1264US10373805B2Apparatuses and methods for avoiding electrical breakdown from RF terminal to adjacent non-RF terminalLAM RES CORP·Filed 2018·Granted Aug 6, 2019·0 cites·21 claims
- 1364US9111733B2Plasma ignition performance for low pressure physical vapor deposition (PVD) processesFREEBORN MARTIN·Filed 2009·Granted Aug 18, 2015·1 cites·20 claims
- 1454US6255601B1Conductive feedthrough for a ceramic body and method of fabricating sameAPPLIED MATERIALS INC·Filed 1997·Granted Jul 3, 2001·20 cites·18 claims
- 1541US6395157B2Method and apparatus for sputter etch conditioning a ceramic bodyAPPLIED MATERIALS INC·Filed 1998·Granted May 28, 2002·4 cites·4 claims
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