Inventor · disambiguated record
Wade Zawalski
Also filed as: ZAWALSKI WADE
3 granted patents·683 citations·filing 1998–2000
79Inventor score
Files withAPPLIED MATERIALS INC3
Top patents by PatentIndex Score
3 records- 0197US6558564B1Plasma energy control by inducing plasma instabilityAPPLIED MATERIALS INC·Filed 2000·Granted May 6, 2003·171 cites·4 claims
- 0296US6352049B1Plasma assisted processing chamber with separate control of species densityAPPLIED MATERIALS INC·Filed 1998·Granted Mar 5, 2002·498 cites·24 claims
- 0348US6566272B2Method for providing pulsed plasma during a portion of a semiconductor wafer processAPPLIED MATERIALS INC·Filed 1999·Granted May 20, 2003·14 cites·13 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →