Inventor · disambiguated record
Heraldo Bothelho
Also filed as: BOTHELHO HERALDO L
2 granted patents·1 pending application·1 citations·filing 2003–2006
39Inventor score
Technology areasG03F
Top patents by PatentIndex Score
3 records- 0157US8211626B2Maintenance of photoresist activity on the surface of dielectric arcs for 90 nm feature sizesAHN SANG H·Filed 2006·Granted Jul 3, 2012·1 cites·10 claims
- 0247US8088563B2Reduction in photoresist footing undercut during development of feature sizes of 120NM or lessAHN SANG H·Filed 2006·Granted Jan 3, 2012·0 cites·27 claims
- 0339US2005118541A1Maintenance of photoresist adhesion and activity on the surface of dielectric ARCS for 90 nm feature sizesAPPLIED MATERIALS INC·Filed 2003·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →