Inventor · disambiguated record
Michael Vogtmann
Also filed as: VOGTMANN MICHAEL · VOGTMANN MICHAEL R
17 granted patents·4 pending applications·265 citations·filing 1999–2024
95Inventor score
Top patents by PatentIndex Score
21 records- 0189US12183597B2Fluid delivery systemICHOR SYSTEMS INC·Filed 2022·Granted Dec 31, 2024·1 cites·12 claims
- 0288US6672943B2Eccentric abrasive wheel for wafer processingWAFER SOLUTIONS INC·Filed 2001·Granted Jan 6, 2004·67 cites·19 claims
- 0386US8968052B2Systems and methods of wafer grindingSTRASBAUGH·Filed 2012·Granted Mar 3, 2015·6 cites·26 claims
- 0486US6645046B1Conditioning mechanism in a chemical mechanical polishing apparatus for semiconductor wafersLAM RES CORP·Filed 2000·Granted Nov 11, 2003·40 cites·13 claims
- 0581US9393669B2Systems and methods of processing substratesSTRASBAUGH·Filed 2013·Granted Jul 19, 2016·5 cites·18 claims
- 0678US8915771B2Method and apparatus for cleaning grinding work chuck using a vacuumVOGTMANN MICHAEL·Filed 2012·Granted Dec 23, 2014·4 cites·9 claims
- 0778US6131589AAccurate positioning of a waferSTRASBAUGH INC·Filed 1999·Granted Oct 17, 2000·36 cites·10 claims
- 0876US7345466B2Method and apparatus for cleaning a probe cardELECTROGLAS INC·Filed 2005·Granted Mar 18, 2008·8 cites·14 claims
- 0975US6405740B1Accurate positioning of a waferLAM RES CORP·Filed 2000·Granted Jun 18, 2002·11 cites·7 claims
- 1074US8133093B2Grinding apparatus having an extendable wheel mountVOGTMANN MICHAEL·Filed 2008·Granted Mar 13, 2012·6 cites·12 claims
- 1173US2025079196A1Fluid delivery systemICHOR SYSTEMS INC·Filed 2024·Application pending·0 cites
- 1271US6505635B1Lifting and rinsing a waferLAM RES CORP·Filed 2000·Granted Jan 14, 2003·9 cites·20 claims
- 1371US6102057ALifting and rinsing a waferSTRASBAUGH·Filed 1999·Granted Aug 15, 2000·25 cites·1 claims
- 1468US6267642B1Sensing the presence of a waferLAM RES CORP·Filed 1999·Granted Jul 31, 2001·21 cites·1 claims
- 1565US6796881B1Sensing the presence of a waferLAM RES CORP·Filed 2001·Granted Sep 28, 2004·6 cites·11 claims
- 1662US8520222B2System and method for in situ monitoring of top wafer thickness in a stack of wafersSCHRAUB FREDERIC ANTHONY·Filed 2011·Granted Aug 27, 2013·4 cites·2 claims
- 1758US6632012B2Mixing manifold for multiple inlet chemistry fluidsWAFER SOLUTIONS INC·Filed 2001·Granted Oct 14, 2003·7 cites·17 claims
- 1858US2025003537A1Fluid delivery systemICHOR SYSTEMS INC·Filed 2024·Application pending·0 cites
- 1957US2024344628A1Fluid flow components and system incorporating sameICHOR SYSTEMS INC·Filed 2024·Application pending·0 cites
- 2050US6283827B1Non-contacting support for a waferLAM RES CORP·Filed 1999·Granted Sep 4, 2001·9 cites·9 claims
- 2143US2014202491A1Method and apparatus for cleaning grinding work chuck using a scraperVOGTMANN MICHAEL·Filed 2013·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →