Inventor · disambiguated record
Kazuo Mera
Also filed as: MERA KAZUO
15 granted patents·1 pending application·291 citations·filing 1989–2006
94Inventor score
Top patents by PatentIndex Score
16 records- 0190US5753923AIon injection device and method thereforHITACHI LTD·Filed 1996·Granted May 19, 1998·78 cites·14 claims
- 0289US6429442B1Ion implanterHITACHI LTD·Filed 2000·Granted Aug 6, 2002·26 cites·2 claims
- 0388US5945681AIon implanting apparatus capable of preventing discharge flaw production on reverse side surface of waferHITACHI LTD·Filed 1997·Granted Aug 31, 1999·53 cites·21 claims
- 0479US5045679AOptical path adjusting system with dual-axis wedge prismsHITACHI LTD·Filed 1989·Granted Sep 3, 1991·31 cites·12 claims
- 0571US5157235ALaser marking systemHITACHI LTD·Filed 1991·Granted Oct 20, 1992·29 cites·27 claims
- 0667US6570171B2Ion implanterHITACHI LTD·Filed 2002·Granted May 27, 2003·5 cites·1 claims
- 0766US5229569ALaser machining apparatus and method of the sameHITACHI LTD·Filed 1991·Granted Jul 20, 1993·24 cites·26 claims
- 0856US6614190B2Ion implanterHITACHI LTD·Filed 2001·Granted Sep 2, 2003·5 cites·25 claims
- 0955US6667485B2Ion implanting apparatus and sample processing apparatusHITACHI LTD·Filed 2002·Granted Dec 23, 2003·2 cites·1 claims
- 1055US6362490B1Ion implanterHITACHI LTD·Filed 1999·Granted Mar 26, 2002·11 cites·5 claims
- 1147US6501080B1Ion implanting apparatus and sample processing apparatusHITACHI LTD·Filed 1999·Granted Dec 31, 2002·6 cites·20 claims
- 1247US5932883AIon implanter for implanting ion on wafer with low contaminationHITACHI LTD·Filed 1997·Granted Aug 3, 1999·13 cites·6 claims
- 1342US7485874B2Apparatus for manufacturing semiconductor substratesSUMCO CORP·Filed 2006·Granted Feb 3, 2009·0 cites·14 claims
- 1442US6104025AIon implanting apparatus capable of preventing discharge flaw production on reverse side surface of waferHITACHI LTD·Filed 1999·Granted Aug 15, 2000·4 cites·8 claims
- 1540US6403969B1Ion implantation system and ion implantation methodHITACHI LTD·Filed 1997·Granted Jun 11, 2002·4 cites·9 claims
- 1638US2003138028A1Wafer temperature detection device for ion implanterFiled 2000·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →