Assignee
SUMCO CORP
JP·469 granted patents·194 pending applications·1,530 citations·filing 2001–2025
Top patents by PatentIndex Score
663 records- 0198US7833348B2Temperature control method of epitaxial growth apparatusSUMCO CORP·Filed 2006·Granted Nov 16, 2010·423 cites·3 claims
- 0295US9786045B2Wafer defect inspection apparatus and method for inspecting a wafer defectSUMCO CORP·Filed 2015·Granted Oct 10, 2017·11 cites·18 claims
- 0395US7354844B2Method for manufacturing SOI substrateSUMCO CORP·Filed 2006·Granted Apr 8, 2008·43 cites·9 claims
- 0494US10233564B2Manufacturing method of monocrystalline silicon and monocrystalline siliconSUMCO CORP·Filed 2017·Granted Mar 19, 2019·5 cites·9 claims
- 0594US7331780B2Heat treatment jig for semiconductor waferSUMCO CORP·Filed 2005·Granted Feb 19, 2008·33 cites·19 claims
- 0694US7320731B2Process for growing silicon single crystal and process for producing silicon waferSUMCO CORP·Filed 2006·Granted Jan 22, 2008·19 cites·8 claims
- 0793US10000863B2Method for cleaning single crystal pulling apparatus, cleaning tool for use therein, and method for manufacturing single crystalSUMCO CORP·Filed 2016·Granted Jun 19, 2018·6 cites·29 claims
- 0893US7718509B2Method for producing bonded waferSUMCO CORP·Filed 2009·Granted May 18, 2010·26 cites·3 claims
- 0993US7713842B2Method for producing bonded waferSUMCO CORP·Filed 2008·Granted May 11, 2010·31 cites·4 claims
- 1092US9637411B2Vitreous silica crucible and method of manufacturing the sameSUMCO CORP·Filed 2016·Granted May 2, 2017·8 cites·12 claims
- 1192US7781309B2Method for manufacturing direct bonded SOI wafer and direct bonded SOI wafer manufactured by the methodSUMCO CORP·Filed 2006·Granted Aug 24, 2010·30 cites·20 claims
- 1292US7435294B2Method for manufacturing silicon single crystal, and silicon waferSUMCO CORP·Filed 2006·Granted Oct 14, 2008·11 cites·5 claims
- 1392US7364618B2Silicon wafer, method for manufacturing the same and method for growing silicon single crystalsSUMCO CORP·Filed 2005·Granted Apr 29, 2008·12 cites·5 claims
- 1491US10100429B2Method for producing a silicon single crystal doped with red phosphorous with reduced number of stacking faults and method for producing a silicon wafer using the sameSUMCO CORP·Filed 2015·Granted Oct 16, 2018·4 cites·12 claims
- 1591US7943497B2Method for manufacturing an SOI substrateSUMCO CORP·Filed 2006·Granted May 17, 2011·23 cites·18 claims
- 1690US11162186B2Quartz glass crucible, manufacturing method thereof, and manufacturing method of silicon single crystal using quartz glass crucibleSUMCO CORP·Filed 2017·Granted Nov 2, 2021·2 cites·4 claims
- 1790US7763541B2Process for regenerating layer transferred waferSUMCO CORP·Filed 2006·Granted Jul 27, 2010·19 cites·15 claims
- 1890US7442623B2Method for manufacturing bonded substrate and bonded substrate manufactured by the methodSUMCO CORP·Filed 2006·Granted Oct 28, 2008·17 cites·13 claims
- 1989US11261540B2Method of controlling convection patterns of silicon melt and method of manufacturing silicon single crystalSUMCO CORP·Filed 2019·Granted Mar 1, 2022·2 cites·4 claims
- 2089US7960254B2Manufacturing method for epitaxial waferSUMCO CORP·Filed 2009·Granted Jun 14, 2011·14 cites·7 claims
- 2189US7700394B2Method for manufacturing silicon wafer methodSUMCO CORP·Filed 2005·Granted Apr 20, 2010·20 cites·8 claims
- 2288US11781242B2Method for controlling convection pattern of silicon melt, method for producing silicon single crystals, and device for pulling silicon single crystalsSUMCO CORP·Filed 2019·Granted Oct 10, 2023·2 cites·4 claims
- 2388US11441238B2Silicon monocrystal manufacturing method and silicon monocrystal pulling deviceSUMCO CORP·Filed 2019·Granted Sep 13, 2022·2 cites·7 claims
- 2488US10422756B2Semiconductor wafer evaluation method and semiconductor waferSUMCO CORP·Filed 2016·Granted Sep 24, 2019·4 cites·6 claims
- 2588US9117676B2Method of producing epitaxial silicon wafer, epitaxial silicon wafer, and method of producing solid-state image sensing deviceSUMCO CORP·Filed 2013·Granted Aug 25, 2015·7 cites·12 claims
- 2687US11695048B2Silicon wafer and manufacturing method of the sameSUMCO CORP·Filed 2021·Granted Jul 4, 2023·2 cites·38 claims
- 2787US11186921B2Method for controlling convection pattern of silicon melt and method for producing monocrystalline siliconSUMCO CORP·Filed 2019·Granted Nov 30, 2021·2 cites·8 claims
- 2887US9403257B2Apparatus and method for double-side polishing of workSUMCO CORP·Filed 2014·Granted Aug 2, 2016·6 cites·5 claims
- 2987US7344689B2Silicon wafer for IGBT and method for producing sameSUMCO CORP·Filed 2006·Granted Mar 18, 2008·12 cites·2 claims
- 3086US12392050B2Infrared transmissivity measurement method of quartz glass crucibleSUMCO CORP·Filed 2024·Granted Aug 19, 2025·0 cites·5 claims
- 3186US9633913B2Method of evaluating epitaxial waferSUMCO CORP·Filed 2016·Granted Apr 25, 2017·6 cites·16 claims
- 3286US7384480B2Apparatus for manufacturing semiconductor single crystalSUMCO CORP·Filed 2006·Granted Jun 10, 2008·6 cites·10 claims
- 3386US7374741B2Method for growing silicon single crystal and silicon waferSUMCO CORP·Filed 2006·Granted May 20, 2008·6 cites·7 claims
- 3486US7364984B2Method for manufacturing SOI substrateSUMCO CORP·Filed 2007·Granted Apr 29, 2008·12 cites·8 claims
- 3586US7300518B2Apparatus and method for producing single crystal, and silicon single crystalSUMCO CORP·Filed 2005·Granted Nov 27, 2007·8 cites·6 claims
- 3686US2025347027A1Quartz glass crucible capable of measuring infrared transmittanceSUMCO CORP·Filed 2025·Application pending·0 cites
- 3785US12454770B2Epitaxial silicon wafer and method for producing the sameSUMCO CORP·Filed 2024·Granted Oct 28, 2025·0 cites·27 claims
- 3885US10718720B2Semiconductor wafer evaluation method and semiconductor waferSUMCO CORP·Filed 2019·Granted Jul 21, 2020·2 cites·6 claims
- 3985US10458044B2Method for cleaning exhaust passage for semiconductor crystal manufacturing deviceSUMCO CORP·Filed 2017·Granted Oct 29, 2019·1 cites·2 claims
- 4085US9567692B2Silicon single crystal manufacturing apparatus and silicon single crystal manufacturing methodSUMCO CORP·Filed 2013·Granted Feb 14, 2017·2 cites·7 claims
- 4185US7846253B2Silicon semiconductor substrate and production method thereofSUMCO CORP·Filed 2007·Granted Dec 7, 2010·4 cites·10 claims
- 4284US9630292B2Single side polishing apparatus for waferSUMCO CORP·Filed 2016·Granted Apr 25, 2017·2 cites·8 claims
- 4384US7960225B1Method of controlling film thinning of semiconductor wafer for solid-state image sensing deviceSUMCO CORP·Filed 2010·Granted Jun 14, 2011·4 cites·6 claims
- 4484US7712290B2Container packaging apparatusSUMCO CORP·Filed 2006·Granted May 11, 2010·17 cites·2 claims
- 4584US7628854B2Process for producing silicon single crystalSUMCO CORP·Filed 2006·Granted Dec 8, 2009·5 cites·9 claims
- 4684US7582357B2Silicon semiconductor substrateSUMCO CORP·Filed 2006·Granted Sep 1, 2009·4 cites·4 claims
- 4784US7442251B2Method for producing silicon single crystals and silicon single crystal produced therebySUMCO CORP·Filed 2006·Granted Oct 28, 2008·5 cites·13 claims
- 4883US11473211B2Method of estimating oxygen concentration of silicon single crystal and method of manufacturing silicon single crystalSUMCO CORP·Filed 2019·Granted Oct 18, 2022·2 cites·4 claims
- 4983US10982350B2Silicon monocrystal production methodSUMCO CORP·Filed 2017·Granted Apr 20, 2021·1 cites·4 claims
- 5083US9224601B2Method of producing epitaxial silicon wafer, epitaxial silicon wafer, and method of producing solid-state image sensing deviceSUMCO CORP·Filed 2013·Granted Dec 29, 2015·4 cites·9 claims
Showing the top 50 of 663 patent records by PatentIndex Score.
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