Inventor · disambiguated record
D'Arcy H. Lorimer
Also filed as: LORIMER D ARCY · LORIMER D ARCY H · LORIMER D ARCY HAROLD
35 granted patents·1,078 citations·filing 1983–2003
98Inventor score
Files withSAES PURE GAS INC15GETTERS SPA9APPLIED MATERIALS INC5AT & T TECHNOLOGIES INC1LORIMER D ARCY HAROLD1
Top patents by PatentIndex Score
35 records- 0196US5069938AMethod of forming a corrosion-resistant protective coating on aluminum substrateAPPLIED MATERIALS INC·Filed 1990·Granted Dec 3, 1991·157 cites·22 claims
- 0292US5238469AMethod and apparatus for removing residual hydrogen from a purified gasSAES PURE GAS INC·Filed 1992·Granted Aug 24, 1993·93 cites·22 claims
- 0390US5063609ASteam generatorAPPLIED MATERIALS INC·Filed 1989·Granted Nov 5, 1991·93 cites·25 claims
- 0487US5363872ALow particulate slit valve system and method for controlling sameAPPLIED MATERIALS INC·Filed 1993·Granted Nov 15, 1994·100 cites·14 claims
- 0585US6508258B1Method and apparatus for cleaning flat workpieces within a semiconductor manufacturing systemFiled 2002·Granted Jan 21, 2003·24 cites·12 claims
- 0684US6460552B1Method and apparatus for cleaning flat workpiecesFiled 1998·Granted Oct 8, 2002·57 cites·16 claims
- 0783US6589878B1Method of cleaning a wafer in an IC fabricationFiled 2002·Granted Jul 8, 2003·22 cites·18 claims
- 0880US6946399B1Cleaning system method and apparatus for the manufacture of integrated cicuitsLORIMER D ARCY HAROLD·Filed 2003·Granted Sep 20, 2005·30 cites·18 claims
- 0979US5685963AIn situ getter pump system and methodSAES PURE GAS INC·Filed 1994·Granted Nov 11, 1997·30 cites·48 claims
- 1075US6398846B1Semiconductor manufacturing system with getter safety deviceSAES PURE GAS INC·Filed 2000·Granted Jun 4, 2002·13 cites·15 claims
- 1175US5972183AGetter pump module and systemGETTERS SPA·Filed 1995·Granted Oct 26, 1999·30 cites·24 claims
- 1274US6068685ASemiconductor manufacturing system with getter safety deviceSAES PURE GAS INC·Filed 1997·Granted May 30, 2000·33 cites·34 claims
- 1373US5492682AHydrogen purificationGETTERS SPA·Filed 1994·Granted Feb 20, 1996·25 cites·34 claims
- 1472US6109880AGetter pump module and system including focus shieldsSAES PURE GAS INC·Filed 1997·Granted Aug 29, 2000·29 cites·27 claims
- 1571US5993165AIn Situ getter pump system and methodSAES PURE GAS INC·Filed 1997·Granted Nov 30, 1999·23 cites·14 claims
- 1670US5334237AMethod and apparatus for predicting end-of-life of a consumable in a fluid purification systemSAES PURE GAS INC·Filed 1993·Granted Aug 2, 1994·31 cites·34 claims
- 1769US6168645B1Safety system for gas purifierGETTERS SPA·Filed 1998·Granted Jan 2, 2001·32 cites·19 claims
- 1867US5895519AMethod and apparatus for purifying hydrogen gasSAES PURE GAS INC·Filed 1997·Granted Apr 20, 1999·32 cites·70 claims
- 1967US5855118ACombination cryopump/getter pump and method for regenerating sameSAES PURE GAS INC·Filed 1997·Granted Jan 5, 1999·33 cites·30 claims
- 2067US5192610ACorrosion-resistant protective coating on aluminum substrate and method of forming sameAPPLIED MATERIALS INC·Filed 1990·Granted Mar 9, 1993·25 cites·20 claims
- 2163US5911560AGetter pump module and systemSAES PURE GAS INC·Filed 1994·Granted Jun 15, 1999·21 cites·24 claims
- 2257US6165328AMethod for processing wafers with in situ getteringGETTERS SPA·Filed 1997·Granted Dec 26, 2000·13 cites·20 claims
- 2356US5980213AGetter pump module and systemGETTERS SPA·Filed 1997·Granted Nov 9, 1999·12 cites·47 claims
- 2454US6142742AGetter pump module and systemSAES PURE GAS INC·Filed 1997·Granted Nov 7, 2000·15 cites·16 claims
- 2554US5879134AIn situ getter pump system and methodSAES PURE GAS INC·Filed 1997·Granted Mar 9, 1999·11 cites·20 claims
- 2652USRE35725EMethod and apparatus for removing residual hydrogen from a purified gasSAES PURE GAS INC·Filed 1996·Granted Feb 10, 1998·17 cites·23 claims
- 2752US5556603AProcess for the purification of hydrogen and a purifier thereforGETTERS SPA·Filed 1995·Granted Sep 17, 1996·16 cites·7 claims
- 2851US6156105ASemiconductor manufacturing system with getter safety deviceSAES PURE GAS INC·Filed 1999·Granted Dec 5, 2000·11 cites·33 claims
- 2950US6232204B1Semiconductor manufacturing system with getter safety deviceSAES PURE GAS INC·Filed 1999·Granted May 15, 2001·11 cites·11 claims
- 3048US5558844AProcess for the purification of hydrogenGETTERS SPA·Filed 1995·Granted Sep 24, 1996·9 cites·13 claims
- 3146US4837052AProcess for forming reflective gold coatingsAPPLIED MATERIALS INC·Filed 1988·Granted Jun 6, 1989·10 cites·5 claims
- 3240US6524934B1Method of manufacture for generation of high purity water vaporFiled 1999·Granted Feb 25, 2003·6 cites·16 claims
- 3340US6043137AGetter pump module and systemGETTERS SPA·Filed 1997·Granted Mar 28, 2000·5 cites·3 claims
- 3439US5997255AMethod for pumping a chamber using an in situ getter pumpGETTERS SPA·Filed 1997·Granted Dec 7, 1999·5 cites·20 claims
- 3535US4508688AMethod of regenerating acetate in a metal removal processAT & T TECHNOLOGIES INC·Filed 1983·Granted Apr 2, 1985·4 cites·19 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →