Inventor · disambiguated record
Feihong Liao
Also filed as: LIAO FEIHONG
2 granted patents·0 citations·filing 2015–2018
23Inventor score
Technology areasG03F
Top patents by PatentIndex Score
2 records- 0138US10345720B2Photolithography tool and method for compensating for surface deformation in carrier of photolithography toolSHANGHAI MICRO ELECTRONICS EQUIPMENT GROUP CO LTD·Filed 2018·Granted Jul 9, 2019·0 cites·10 claims
- 0231US9760022B2Lithography machine workpiece table and vertical position initialization method thereofSHANGHAI MICROELECTRONICS EQUI·Filed 2015·Granted Sep 12, 2017·0 cites·13 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →