Inventor · disambiguated record
Jairaj Payyapilly
Also filed as: PAYYAPILLY JAIRAJ · PAYYAPILLY JAIRAJ J · PAYYAPILLY JAIRAJ JOSEPH
5 granted patents·3 pending applications·7 citations·filing 2011–2025
70Inventor score
Technology areasH10P
Top patents by PatentIndex Score
8 records- 0179US11373877B2Methods and apparatus for in-situ protection liners for high aspect ratio reactive ion etchingAPPLIED MATERIALS INC·Filed 2020·Granted Jun 28, 2022·1 cites·20 claims
- 0272US8778207B2Plasma etch processes for boron-doped carbonaceous mask layersKIM JONG MUN·Filed 2012·Granted Jul 15, 2014·3 cites·20 claims
- 0369US9748366B2Etching oxide-nitride stacks using C4F6H2APPLIED MATERIALS INC·Filed 2014·Granted Aug 29, 2017·2 cites·20 claims
- 0467US12235624B2Methods and mechanisms for adjusting process chamber parameters during substrate manufacturingAPPLIED MATERIALS INC·Filed 2021·Granted Feb 25, 2025·0 cites·23 claims
- 0567US2025208605A1Methods and mechanisms for adjusting process chamber parameters during substrate manufacturingAPPLIED MATERIALS INC·Filed 2025·Application pending·0 cites
- 0662US9305804B2Plasma etch processes for opening mask layersAPPLIED MATERIALS INC·Filed 2014·Granted Apr 5, 2016·1 cites·20 claims
- 0738US2013122712A1Method of etching high aspect ratio features in a dielectric layerKIM JONG MUN·Filed 2012·Application pending·0 cites
- 0836US2013224960A1Methods for etching oxide layers using process gas pulsingPAYYAPILLY JAIRAJ·Filed 2011·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →