Inventor · disambiguated record
Eric Shurtliff
Also filed as: SHURTLIFF ERIC · SHURTLIFF ERIC C
5 granted patents·534 citations·filing 1996–1997
85Inventor score
Technology areasH10P
Top patents by PatentIndex Score
5 records- 0196US5950327AMethods and apparatus for cleaning and drying wafersSPEEDFAM IPEC CORP·Filed 1996·Granted Sep 14, 1999·418 cites·41 claims
- 0272US5975094AMethod and apparatus for enhanced cleaning of a workpiece with mechanical energySPEEDFAM CORP·Filed 1997·Granted Nov 2, 1999·45 cites·28 claims
- 0363US5899216AApparatus for rinsing wafers in the context of a combined cleaning rinsing and drying systemSPEEDFAM CORP·Filed 1997·Granted May 4, 1999·31 cites·19 claims
- 0452US5870792AApparatus for cleaning wafers and discsSPEEDFAM CORP·Filed 1997·Granted Feb 16, 1999·19 cites·12 claims
- 0551US6006391AWorkpiece cleaning element with improved rib configurationSPEEDFAM IPEC CORP·Filed 1997·Granted Dec 28, 1999·21 cites·14 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →