Inventor · disambiguated record
Aritoshi Sugimoto
Also filed as: SUGIMOTO ARITOSHI
42 granted patents·10 pending applications·1,435 citations·filing 1997–2021
99Inventor score
Files withHITACHI LTD36HITACHI HIGH TECH CORP9HITACHI ULSI SYS CO LTD2HASEGAWA NORIO1HITACHI ELECTR ENG1
Top patents by PatentIndex Score
52 records- 0199US6172363B1Method and apparatus for inspecting integrated circuit patternHITACHI LTD·Filed 1997·Granted Jan 9, 2001·185 cites·20 claims
- 0299US5986263AElectron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the sameHITACHI LTD·Filed 1997·Granted Nov 16, 1999·164 cites·21 claims
- 0398US6734687B1Apparatus for detecting defect in device and method of detecting defectHITACHI LTD·Filed 2000·Granted May 11, 2004·134 cites·10 claims
- 0497US6329826B1Method and apparatus for inspecting integrated circuit patternHITACHI LTD·Filed 2000·Granted Dec 11, 2001·95 cites·4 claims
- 0596US7417444B2Method and apparatus for inspecting integrated circuit patternHITACHI LTD·Filed 2005·Granted Aug 26, 2008·25 cites·7 claims
- 0696US6771077B2Method of testing electronic devices indicating short-circuitHITACHI LTD·Filed 2002·Granted Aug 3, 2004·85 cites·11 claims
- 0793US6583634B1Method of inspecting circuit pattern and inspecting instrumentHITACHI LTD·Filed 2000·Granted Jun 24, 2003·68 cites·5 claims
- 0892US6960765B2Probe driving method, and probe apparatusHITACHI ULSI SYS CO LTD·Filed 2001·Granted Nov 1, 2005·50 cites·7 claims
- 0992US6172365B1Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the sameHITACHI LTD·Filed 1999·Granted Jan 9, 2001·48 cites·10 claims
- 1091US6373054B2Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the sameHITACHI LTD·Filed 2001·Granted Apr 16, 2002·23 cites·22 claims
- 1190US7952074B2Method and apparatus for inspecting integrated circuit patternHITACHI LTD·Filed 2008·Granted May 31, 2011·8 cites·18 claims
- 1288US6703850B2Method of inspecting circuit pattern and inspecting instrumentHITACHI LTD·Filed 2003·Granted Mar 9, 2004·37 cites·6 claims
- 1387US6717142B2Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the sameHITACHI LTD·Filed 2002·Granted Apr 6, 2004·16 cites·15 claims
- 1486US7133550B2Pattern inspection method and apparatusHITACHI LTD·Filed 2001·Granted Nov 7, 2006·19 cites·15 claims
- 1586US6760472B1Identification method for an article using crystal defectsHITACHI LTD·Filed 1999·Granted Jul 6, 2004·69 cites·8 claims
- 1686US6087673AMethod of inspecting pattern and apparatus thereofHITACHI LTD·Filed 1998·Granted Jul 11, 2000·58 cites·29 claims
- 1785US6559663B2Method and apparatus for inspecting integrated circuit patternHITACHI LTD·Filed 2001·Granted May 6, 2003·20 cites·10 claims
- 1884US7026830B2Method and apparatus for inspecting integrated circuit patternHITACHI LTD·Filed 2003·Granted Apr 11, 2006·19 cites·6 claims
- 1984US6365425B1Method of manufacturing semiconductor deviceHITACHI LTD·Filed 2000·Granted Apr 2, 2002·26 cites·9 claims
- 2083US7957579B2Pattern inspection method and apparatusHITACHI LTD·Filed 2007·Granted Jun 7, 2011·5 cites·11 claims
- 2183US7894658B2Pattern inspection method and apparatusHITACHI LTD·Filed 2007·Granted Feb 22, 2011·4 cites·17 claims
- 2283US6828554B2Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the sameHITACHI LTD·Filed 2004·Granted Dec 7, 2004·11 cites·8 claims
- 2383US5877498AMethod and apparatus for X-ray analysesHITACHI LTD·Filed 1997·Granted Mar 2, 1999·42 cites·20 claims
- 2481US6236057B1Method of inspecting pattern and apparatus thereof with a differential brightness image detectionHITACHI LTD·Filed 2000·Granted May 22, 2001·15 cites·23 claims
- 2580US7266235B2Pattern inspection method and apparatusHITACHI LTD·Filed 2001·Granted Sep 4, 2007·10 cites·13 claims
- 2679US7301146B2Probe driving method, and probe apparatusHITACHI LTD·Filed 2005·Granted Nov 27, 2007·8 cites·16 claims
- 2778US6970004B2Apparatus for inspecting defects of devices and method of inspecting defectsHITACHI ULSI SYS CO LTD·Filed 2004·Granted Nov 29, 2005·18 cites·8 claims
- 2875US6347150B1Method and system for inspecting a patternHITACHI LTD·Filed 1997·Granted Feb 12, 2002·52 cites·17 claims
- 2974US7457453B2Pattern inspection method and apparatusHITACHI LTD·Filed 2007·Granted Nov 25, 2008·4 cites·4 claims
- 3074US6291847B1Semiconductor integrated circuit device and process for manufacturing the sameHITACHI LTD·Filed 1998·Granted Sep 18, 2001·30 cites·14 claims
- 3173US6376854B2Method of inspecting a pattern on a substrateHITACHI LTD·Filed 2001·Granted Apr 23, 2002·8 cites·10 claims
- 3272US6895346B2Method for test conditionsHITACHI LTD·Filed 2002·Granted May 17, 2005·10 cites·15 claims
- 3370US7260256B2Method and system for inspecting a patternRENESAS TECH CORP·Filed 2000·Granted Aug 21, 2007·14 cites·5 claims
- 3469US7122796B2Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the sameHITACHI LTD·Filed 2004·Granted Oct 17, 2006·4 cites·11 claims
- 3568US6780660B2System for testing electronic devicesHITACHI LTD·Filed 2002·Granted Aug 24, 2004·9 cites·10 claims
- 3667US6770496B2Method of testing electronic devicesHITACHI LTD·Filed 2002·Granted Aug 3, 2004·8 cites·12 claims
- 3767US6661912B1Inspecting method and apparatus for repeated micro-miniature patternsHITACHI ELECTR ENG·Filed 1998·Granted Dec 9, 2003·29 cites·12 claims
- 3864US11417892B2Fuel cellHITACHI HIGH TECH CORP·Filed 2018·Granted Aug 16, 2022·0 cites·15 claims
- 3962US2024120520A1Fuel battery cell and manufacturing method thereforHITACHI HIGH TECH CORP·Filed 2021·Application pending·0 cites
- 4058US2023127271A1Fuel Cell and Method for Producing SameHITACHI HIGH TECH CORP·Filed 2020·Application pending·0 cites
- 4156US11855318B2Fuel battery cell, fuel battery system, leak detection methodHITACHI HIGH TECH CORP·Filed 2019·Granted Dec 26, 2023·0 cites·13 claims
- 4252US2022393215A1Fuel Cell, Fuel Cell System and Method for Producing Fuel CellHITACHI HIGH TECH CORP·Filed 2019·Application pending·0 cites
- 4352US2023006233A1Fuel Cell and Method for Producing Fuel CellHITACHI HIGH TECH CORP·Filed 2019·Application pending·0 cites
- 4452US2022399558A1Fuel Battery Cell and Method for Manufacturing Fuel Battery CellHITACHI HIGH TECH CORP·Filed 2019·Application pending·0 cites
- 4552US2022384835A1Fuel Cell Array and Fuel Cell Inspection MethodHITACHI HIGH TECH CORP·Filed 2019·Application pending·0 cites
- 4649US2006110667A1Method of fabrication of semiconductor integrated circuit device and mask fabrication methodHASEGAWA NORIO·Filed 2006·Application pending·0 cites
- 4746US6944325B2Inspecting method and apparatus for repeated micro-miniature patternsHITACHI HIGH TECH ELECT ENG CO·Filed 2003·Granted Sep 13, 2005·3 cites·14 claims
- 4846US6573546B2Semiconductor integrated circuit device and process for manufacturing the sameHITACHI LTD·Filed 2001·Granted Jun 3, 2003·2 cites·3 claims
- 4945US2022069327A1Fuel battery cell and fuel battery moduleHITACHI HIGH TECH CORP·Filed 2019·Application pending·0 cites
- 5041US2005041836A1Information media using information of defect in an articleHITACHI LTD·Filed 2004·Application pending·0 cites
Showing the top 50 of 52 patent records by PatentIndex Score.
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