Inventor · disambiguated record
Kevin R. Lensing
Also filed as: LENSING KEVIN · LENSING KEVIN R
41 granted patents·4 pending applications·735 citations·filing 2001–2008
98Inventor score
Files withADVANCED MICRO DEVICES INC34GLOBALFOUNDRIES INC4LENSING KEVIN R2ADVANCED MICRODEVICES INC1ADVANCED MICRON DEVICES INC1
Top patents by PatentIndex Score
45 records- 0195US6383824B1Method of using scatterometry measurements to control deposition processesADVANCED MICRO DEVICES INC·Filed 2001·Granted May 7, 2002·104 cites·56 claims
- 0294US6774998B1Method and apparatus for identifying misregistration in a complimentary phase shift mask processADVANCED MICRO DEVICES INC·Filed 2001·Granted Aug 10, 2004·59 cites·61 claims
- 0393US6716646B1Method and apparatus for performing overlay measurements using scatterometryADVANCED MICRO DEVICES INC·Filed 2001·Granted Apr 6, 2004·69 cites·12 claims
- 0491US6433871B1Method of using scatterometry measurements to determine and control gate electrode profilesADVANCED MICRON DEVICES INC·Filed 2001·Granted Aug 13, 2002·56 cites·77 claims
- 0588US6597447B1Method and apparatus for periodic correction of metrology dataADVANCED MICRO DEVICES INC·Filed 2001·Granted Jul 22, 2003·32 cites·31 claims
- 0688US6537833B1Method and apparatus for characterizing an interconnect structure profile using scatterometry measurementsADVANCED MICRO DEVICES INC·Filed 2001·Granted Mar 25, 2003·34 cites·53 claims
- 0785US7337034B1Method and apparatus for determining a root cause of a statistical process control failureADVANCED MICRO DEVICES INC·Filed 2005·Granted Feb 26, 2008·17 cites·23 claims
- 0885US6650423B1Method and apparatus for determining column dimensions using scatterometryADVANCED MICRO DEVICES INC·Filed 2001·Granted Nov 18, 2003·34 cites·59 claims
- 0984US6464563B1Method and apparatus for detecting dishing in a polished layerADVANCED MICRODEVICES INC·Filed 2001·Granted Oct 15, 2002·31 cites·32 claims
- 1083US7262864B1Method and apparatus for determining grid dimensions using scatterometryADVANCED MICRO DEVICES INC·Filed 2001·Granted Aug 28, 2007·22 cites·47 claims
- 1181US7277824B1Method and apparatus for classifying faults based on wafer state data and sensor tool trace dataADVANCED MICRO DEVICES INC·Filed 2005·Granted Oct 2, 2007·11 cites·7 claims
- 1279US6630362B1Method and apparatus for performing trench depth analysisADVANCED MICRO DEVICES INC·Filed 2001·Granted Oct 7, 2003·22 cites·15 claims
- 1379US6451700B1Method and apparatus for measuring planarity of a polished layerADVANCED MICRO DEVICES INC·Filed 2001·Granted Sep 17, 2002·22 cites·16 claims
- 1478US7738986B2Method and apparatus for compensating metrology data for site bias prior to filteringGLOBALFOUNDRIES INC·Filed 2006·Granted Jun 15, 2010·4 cites·17 claims
- 1578US6660543B1Method of measuring implant profiles using scatterometric techniques wherein dispersion coefficients are varied based upon depthADVANCED MICRO DEVICES INC·Filed 2002·Granted Dec 9, 2003·22 cites·52 claims
- 1676US8041518B2Determining die test protocols based on process healthGLOBALFOUNDRIES INC·Filed 2007·Granted Oct 18, 2011·8 cites·23 claims
- 1776US6707562B1Method of using scatterometry measurements to control photoresist etch processADVANCED MICRO DEVICES INC·Filed 2001·Granted Mar 16, 2004·18 cites·80 claims
- 1876US6643008B1Method of detecting degradation in photolithography processes based upon scatterometric measurements of grating structures, and a device comprising such structuresADVANCED MICRO DEVICES INC·Filed 2002·Granted Nov 4, 2003·18 cites·46 claims
- 1974US8149384B2Method and apparatus for extracting dose and focus from critical dimension dataCHAUHAN SIDDHARTH·Filed 2007·Granted Apr 3, 2012·7 cites·20 claims
- 2074US6458610B1Method and apparatus for optical film stack fault detectionADVANCED MICRO DEVICES INC·Filed 2001·Granted Oct 1, 2002·20 cites·43 claims
- 2172US7838308B2Method of controlling embedded material/gate proximityADVANCED MICRO DEVICES INC·Filed 2008·Granted Nov 23, 2010·3 cites·22 claims
- 2272US6746882B1Method of correcting non-linearity of metrology tools, and system for performing sameADVANCED MICRO DEVICES INC·Filed 2002·Granted Jun 8, 2004·11 cites·41 claims
- 2371US6657716B1Method and apparatus for detecting necking over field/active transitionsADVANCED MICRO DEVICES INC·Filed 2001·Granted Dec 2, 2003·14 cites·28 claims
- 2468US6582863B1Method of controlling photolithography processes based upon scatterometric measurements of sub-nominal grating structuresADVANCED MICRO DEVICES INC·Filed 2001·Granted Jun 24, 2003·9 cites·84 claims
- 2567US6933158B1Method of monitoring anneal processes using scatterometry, and system for performing sameADVANCED MICRO DEVICES INC·Filed 2002·Granted Aug 23, 2005·11 cites·84 claims
- 2666US6625514B1Method and apparatus for optical lifetime tracking of trench featuresADVANCED MICRO DEVICES INC·Filed 2001·Granted Sep 23, 2003·10 cites·40 claims
- 2766US6562635B1Method of controlling metal etch processes, and system for accomplishing sameADVANCED MICRO DEVICES INC·Filed 2002·Granted May 13, 2003·10 cites·57 claims
- 2865US6980300B1Method and apparatus for generating a polishing process endpoint signal using scatterometryADVANCED MICRO DEVICES INC·Filed 2001·Granted Dec 27, 2005·10 cites·24 claims
- 2965US6927080B1Structures for analyzing electromigration, and methods of using sameADVANCED MICRO DEVICES INC·Filed 2002·Granted Aug 9, 2005·10 cites·65 claims
- 3064US6804014B1Method and apparatus for determining contact opening dimensions using scatterometryADVANCED MICRO DEVICES INC·Filed 2001·Granted Oct 12, 2004·7 cites·74 claims
- 3162US7983871B2Method and apparatus for employing previous test insertion results for testing a deviceADVANCED MICRO DEVICES INC·Filed 2007·Granted Jul 19, 2011·4 cites·25 claims
- 3262US7682845B2Methods for calibrating a process for growing an epitaxial silicon film and methods for growing an epitaxial silicon filmGLOBALFOUNDRIES INC·Filed 2007·Granted Mar 23, 2010·1 cites·16 claims
- 3361US6785009B1Method of using high yielding spectra scatterometry measurements to control semiconductor manufacturing processes, and systems for accomplishing sameADVANCED MICRO DEVICES INC·Filed 2002·Granted Aug 31, 2004·8 cites·25 claims
- 3460US7925369B2Method and apparatus for optimizing models for extracting dose and focus from critical dimensionGLOBALFOUNDRIES INC·Filed 2007·Granted Apr 12, 2011·1 cites·23 claims
- 3560US6766215B1Method and apparatus for detecting necking over field/active transitionsADVANCED MICRO DEVICES INC·Filed 2003·Granted Jul 20, 2004·8 cites·9 claims
- 3659US6881594B1Method of using scatterometry for analysis of electromigration, and structures for performing sameADVANCED MICRO DEVICES INC·Filed 2002·Granted Apr 19, 2005·2 cites·54 claims
- 3758US7519447B1Method and apparatus for integrating multiple sample plansADVANCED MICRO DEVICES INC·Filed 2004·Granted Apr 14, 2009·6 cites·22 claims
- 3846US2009228132A1Method and apparatus for controlling stressed layer gate proximityLENSING KEVIN R·Filed 2008·Application pending·0 cites
- 3946US2009144686A1Method and apparatus for monitoring marginal layout design rulesLENSING KEVIN R·Filed 2007·Application pending·0 cites
- 4045US2009144692A1Method and apparatus for monitoring optical proximity correction performanceCAIN JASON P·Filed 2007·Application pending·0 cites
- 4143US7822567B2Method and apparatus for implementing scaled device testsADVANCED MICRO DEVICES INC·Filed 2007·Granted Oct 26, 2010·0 cites·20 claims
- 4242US7502702B1Method and apparatus for dynamic adjustment of sensor and/or metrology sensitivitiesADVANCED MICRO DEVICES INC·Filed 2005·Granted Mar 10, 2009·0 cites·22 claims
- 4341US7716004B2Method and apparatus for matching test equipment calibrationADVANCED MICRO DEVICES INC·Filed 2007·Granted May 11, 2010·0 cites·34 claims
- 4440US7282374B1Method and apparatus for comparing device and non-device structuresADVANCED MICRO DEVICES INC·Filed 2004·Granted Oct 16, 2007·0 cites·23 claims
- 4540US2006058979A1Method and system for calibrating integrated metrology systems and stand-alone metrology systems that acquire wafer state dataMARKLE RICHARD J·Filed 2004·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →