Inventor · disambiguated record
Keven Yu
Also filed as: YU KEVEN · YU KEVEN KAISHENG
3 granted patents·3 pending applications·3 citations·filing 2010–2013
52Inventor score
Top patents by PatentIndex Score
6 records- 0169US9159574B2Method of silicon etch for trench sidewall smoothingAPPLIED MATERIALS INC·Filed 2013·Granted Oct 13, 2015·3 cites·14 claims
- 0241US8778574B2Method for etching EUV material layers utilized to form a photomaskYU KEVEN·Filed 2013·Granted Jul 15, 2014·0 cites·21 claims
- 0339US10595365B2Chamber lid heater ring assemblyOUYE ALAN H·Filed 2011·Granted Mar 17, 2020·0 cites·9 claims
- 0436US2013048606A1Methods for in-situ chamber dry clean in photomask plasma etching processing chamberMAO ZHIGANG·Filed 2011·Application pending·0 cites
- 0535US2010276391A1Inductively coupled plasma reactor having rf phase control and methods of use thereofAPPLIED MATERIALS INC·Filed 2010·Application pending·0 cites
- 0633US2013092655A1Method for etching an euv reflective multi-material layers utilized to form a photomaskYU KEVEN·Filed 2012·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →