Inventor · disambiguated record
Jay Burnham
Also filed as: BURNHAM JAY · BURNHAM JAY S · BURNHAM JAY SANFORD
20 granted patents·1 pending application·241 citations·filing 1998–2016
94Inventor score
Top patents by PatentIndex Score
21 records- 0188US5947053AWear-through detector for multilayered parts and methods of using sameIBM·Filed 1998·Granted Sep 7, 1999·91 cites·18 claims
- 0286US7138691B2Selective nitridation of gate oxidesIBM·Filed 2004·Granted Nov 21, 2006·31 cites·8 claims
- 0386US6780720B2Method for fabricating a nitrided silicon-oxide gate dielectricIBM·Filed 2002·Granted Aug 24, 2004·37 cites·22 claims
- 0486US6521977B1Deuterium reservoirs and ingress pathsIBM·Filed 2000·Granted Feb 18, 2003·30 cites·20 claims
- 0577US7759260B2Selective nitridation of gate oxidesIBM·Filed 2006·Granted Jul 20, 2010·5 cites·21 claims
- 0671US7291568B2Method for fabricating a nitrided silicon-oxide gate dielectricIBM·Filed 2003·Granted Nov 6, 2007·13 cites·19 claims
- 0771US6770501B2Deuterium reservoirs and ingress pathsIBM·Filed 2002·Granted Aug 3, 2004·11 cites·17 claims
- 0863US6838396B2Bilayer ultra-thin gate dielectric and process for semiconductor metal contamination reductionIBM·Filed 2003·Granted Jan 4, 2005·8 cites·12 claims
- 0962US8912091B2Backside metal ground plane with improved metal adhesion and design structuresIBM·Filed 2013·Granted Dec 16, 2014·1 cites·23 claims
- 1062US7888142B2Copper contamination detection method and system for monitoring copper contaminationIBM·Filed 2007·Granted Feb 15, 2011·1 cites·15 claims
- 1162US6706644B2Thermal nitrogen distribution method to improve uniformity of highly doped ultra-thin gate capacitorsIBM·Filed 2002·Granted Mar 16, 2004·7 cites·3 claims
- 1258US7342290B2Semiconductor metal contamination reduction for ultra-thin gate dielectricsIBM·Filed 2004·Granted Mar 11, 2008·6 cites·12 claims
- 1353US8758962B2Method and apparatus for sub-pellicle defect reduction on photomasksBURNHAM JAY S·Filed 2012·Granted Jun 24, 2014·0 cites·16 claims
- 1449US8709887B2Method for fabricating a nitrided silicon-oxide gate dielectricBURNHAM JAY S·Filed 2007·Granted Apr 29, 2014·0 cites·18 claims
- 1549US8173331B2Method and apparatus for sub-pellicle defect reduction on photomasksBURNHAM JAY S·Filed 2010·Granted May 8, 2012·0 cites·20 claims
- 1645US7957917B2Copper contamination detection method and system for monitoring copper contaminationIBM·Filed 2007·Granted Jun 7, 2011·0 cites·18 claims
- 1745US2010187614A1Selective nitridation of gate oxidesIBM·Filed 2010·Application pending·0 cites
- 1843US9953831B1Device structures with multiple nitrided layersGLOBALFOUNDRIES INC·Filed 2016·Granted Apr 24, 2018·0 cites·18 claims
- 1943US7737050B2Method of fabricating a nitrided silicon oxide gate dielectric layerIBM·Filed 2006·Granted Jun 15, 2010·0 cites·45 claims
- 2043US6909157B2Thermal nitrogen distribution method to improve uniformity of highly doped ultra-thin gate capacitorsIBM·Filed 2003·Granted Jun 21, 2005·0 cites·6 claims
- 2140US8236580B2Copper contamination detection method and system for monitoring copper contaminationBURNHAM JAY SANFORD·Filed 2010·Granted Aug 7, 2012·0 cites·16 claims
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