Inventor · disambiguated record
Richard Allen Sprenkle
Also filed as: SPRENKLE RICHARD ALLEN
5 granted patents·5 pending applications·8 citations·filing 2013–2023
69Inventor score
Files withAPPLIED MATERIALS INC7VARIAN SEMICONDUCTOR EQUIPMENT2VARIAN SEMICONDUCTOR EQUIPMENT ASS INC1
Top patents by PatentIndex Score
10 records- 0190US8853653B1Apparatus and techniques for controlling ion implantation uniformityVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2013·Granted Oct 7, 2014·6 cites·16 claims
- 0282US12283460B2Closed loop faraday correction of a horizontal beam current profile for uniform current tuningAPPLIED MATERIALS INC·Filed 2022·Granted Apr 22, 2025·1 cites·19 claims
- 0364US9006692B2Apparatus and techniques for controlling ion implantation uniformityVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2013·Granted Apr 14, 2015·1 cites·14 claims
- 0461US2025201513A1Techniques for guide star alignment of an ion implanterAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 0558US12340967B2Methods, mediums, and systems for identifying tunable domains for ion beam shape matchingAPPLIED MATERIALS INC·Filed 2021·Granted Jun 24, 2025·0 cites·21 claims
- 0658US2025112026A1Inverting implanter process model for parameter generationAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 0757US2025200359A1Machine learning models for tuning an ion implanterAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 0857US2025173560A1Adapting ion implant model during maintenance recoveryAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 0956US2025140510A1Dynamic ion beam shape selectionAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 1038US10199257B2Fixed position mask for workpiece edge treatmentVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2017·Granted Feb 5, 2019·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →