Inventor · disambiguated record
Ming Zhang
Also filed as: ZHANG MING · ZHANG MING-TANG
47 granted patents·5 pending applications·43 citations·filing 2008–2022
96Inventor score
Top patents by PatentIndex Score
52 records- 0191US11499378B2Blade cap force modulation system for a drill bitCNPC USA CORP·Filed 2020·Granted Nov 15, 2022·4 cites·16 claims
- 0289US8979458B2Heat dissipation device having fastenerSUN JIAN·Filed 2012·Granted Mar 17, 2015·12 cites·6 claims
- 0378US11499377B2Force modulation system for a drill bitCNPC USA CORP·Filed 2020·Granted Nov 15, 2022·1 cites·14 claims
- 0476US11307018B2Two-degree-of-freedom heterodyne grating interferometry measurement systemUNIV TSINGHUA·Filed 2019·Granted Apr 19, 2022·2 cites·10 claims
- 0574US10830020B2Tool assembly with a fluidic agitator and a coatingCNPC USA CORP·Filed 2019·Granted Nov 10, 2020·2 cites·20 claims
- 0673US9879979B2Heterodyne grating interferometer displacement measurement systemUNIV TSINGHUA·Filed 2013·Granted Jan 30, 2018·4 cites·9 claims
- 0772US12270645B2High-resolution phase detection method and system based on plane grating laser interferometerUNIV TSINGHUA·Filed 2020·Granted Apr 8, 2025·1 cites·6 claims
- 0871US8245763B2Heat dissipation device with guilding lines and soldered heat pipes and manufacturing method thereofZHANG MING-TANG·Filed 2009·Granted Aug 21, 2012·4 cites·4 claims
- 0969US10532832B2Magnetic levitation reaction sphereUNIV TSINGHUA·Filed 2016·Granted Jan 14, 2020·2 cites·4 claims
- 1066US8599361B2Nanometer-precision six-degree-of-freedom magnetic suspension micro-motion table and application thereofZHU YU·Filed 2011·Granted Dec 3, 2013·1 cites·3 claims
- 1166US8284380B2Dual-stage switching system for lithographic machineZHU YU·Filed 2008·Granted Oct 9, 2012·2 cites·5 claims
- 1266US8084897B2Micro stage with 6 degrees of freedomZHU YU·Filed 2008·Granted Dec 27, 2011·2 cites·1 claims
- 1365US11808090B2Force modulation system for a drill bitCNPC USA CORP·Filed 2022·Granted Nov 7, 2023·0 cites·12 claims
- 1463US11879296B2Blade cap force modulation system for a drill bitCNPC USA CORP·Filed 2022·Granted Jan 23, 2024·0 cites·9 claims
- 1563US10450819B2Tool assembly with a fluidic agitatorCNPC USA CORP·Filed 2017·Granted Oct 22, 2019·1 cites·16 claims
- 1663US9903704B2Three-DOF heterodyne grating interferometer displacement measurement systemUNIV TSINGHUA·Filed 2014·Granted Feb 27, 2018·2 cites·6 claims
- 1761US8459336B2Heat dissipation device with guiding line and soldered heat pipeZHANG MING-TANG·Filed 2012·Granted Jun 11, 2013·1 cites·1 claims
- 1857US9885556B2Dual-frequency grating interferometer displacement measurement systemUNIV TSINGHUA·Filed 2013·Granted Feb 6, 2018·1 cites·8 claims
- 1956US9752643B2Negative stiffness system for gravity compensation of micropositionerSHANGHAI MICROELECTRONICS EQUI·Filed 2013·Granted Sep 5, 2017·1 cites·3 claims
- 2053US12169367B2Vertical motion protection method and device based on dual-stage motion system of photolithography machineUNIV TSINGHUA·Filed 2021·Granted Dec 17, 2024·0 cites·10 claims
- 2153US10753167B2Tool assembly with a fluidic agitatorCNPC USA CORP·Filed 2019·Granted Aug 25, 2020·0 cites·15 claims
- 2252US12346030B2Device and method for regulating and controlling incident angle of light beam in laser interference lithographyUNIV TSINGHUA·Filed 2021·Granted Jul 1, 2025·0 cites·9 claims
- 2351US12393127B2Exposure light beam phase measurement method in laser interference photolithography, and photolithography systemUNIV TSINGHUA·Filed 2020·Granted Aug 19, 2025·0 cites·10 claims
- 2451US8578605B2Manufacturing method of a heat dissipation device with guiding lines and soldered heat pipesZHANG MING-TANG·Filed 2012·Granted Nov 12, 2013·0 cites·5 claims
- 2550US11703361B2Five-degree-of-freedom heterodyne grating interferometry systemUNIV TSINGHUA·Filed 2019·Granted Jul 18, 2023·0 cites·9 claims
- 2648US11940349B2Plane grating calibration systemUNIV TSINGHUA·Filed 2020·Granted Mar 26, 2024·0 cites·9 claims
- 2748US9869857B2Optical grating phase modulator for laser interference photoetching systemUNIV TSINGHUA·Filed 2014·Granted Jan 16, 2018·0 cites·4 claims
- 2847US12189300B2Scanning interference lithographic systemUNIV TSINGHUA·Filed 2020·Granted Jan 7, 2025·0 cites·10 claims
- 2945US12332053B2Heterodyne grating interferometry system based on secondary diffractionUNIV TSINGHUA·Filed 2021·Granted Jun 17, 2025·0 cites·9 claims
- 3045US12038690B2Laser interference photolithography systemUNIV TSINGHUA·Filed 2020·Granted Jul 16, 2024·0 cites·9 claims
- 3144US11702891B2Force modulation system with an elastic force member for downhole conditionsCNPC USA CORP·Filed 2021·Granted Jul 18, 2023·0 cites·16 claims
- 3244US10597172B2Magnetic-fluid momentum sphereUNIV TSINGHUA·Filed 2016·Granted Mar 24, 2020·0 cites·5 claims
- 3344US2015326150A1Maglev workpiece table with six degrees of freedomUNIV TSINGHUA·Filed 2013·Application pending·0 cites
- 3443US9791789B2Magnetically suspended coarse motion and fine motion integrated reticle stage driven by planar motorUNIV TSINGHUA·Filed 2015·Granted Oct 17, 2017·0 cites·4 claims
- 3543US9310797B2Single degree of freedom vibration isolating device of linear motor and motion control method thereofUNIV TSINGHUA·Filed 2013·Granted Apr 12, 2016·0 cites·6 claims
- 3642US9182217B2Method for measuring displacement of large-range moving platformUNIV TSINGHUA·Filed 2013·Granted Nov 10, 2015·0 cites·5 claims
- 3742US8958078B2Two-dimensional, position-sensitive sensor-based system for positioning object having six degrees of freedom in spaceZHANG MING·Filed 2012·Granted Feb 17, 2015·0 cites·2 claims
- 3842US2016138903A1Two-dof heterodyne grating interferometer displacement measurement systemUNIV TSINGHUA·Filed 2014·Application pending·0 cites
- 3942US2011135464A1FanFURUI PRECISE COMPONENT KUNSHAN CO LTD·Filed 2010·Application pending·0 cites
- 4041US11525673B2Five-degree-of-freedom heterodyne grating interferometry systemUNIV TSINGHUA·Filed 2018·Granted Dec 13, 2022·0 cites·12 claims
- 4141US2024319619A1Phase measurement device for laser interference photolithography system, and method for using sameUNIV TSINGHUA·Filed 2020·Application pending·0 cites
- 4241US2015311099A1Wafer Stage Having Function of Anti-CollisionSHANGHAI MICROELECTRONICS EQUI·Filed 2013·Application pending·0 cites
- 4340US9766054B2Planar motor rotor displacement measuring device and its measuring methodSHANGHAI MICROELECTRONICS EQUI·Filed 2013·Granted Sep 19, 2017·0 cites·3 claims
- 4440US9547245B2Dual wafer stage switching system for a lithography machineZHU YU·Filed 2012·Granted Jan 17, 2017·0 cites·5 claims
- 4540US9310782B2Method for measuring displacement of planar motor rotorSHANGHAI MICROELECTRONICS EQUI·Filed 2013·Granted Apr 12, 2016·0 cites·3 claims
- 4637US11022423B2Method for calibrating an error of installation of an interferometer in a multi-axis laser displacement measurement systemUNIV TSINGHUA·Filed 2018·Granted Jun 1, 2021·0 cites·2 claims
- 4735US9030648B2Dual wafer stage exchanging system for lithographic deviceZHU YU·Filed 2010·Granted May 12, 2015·0 cites·4 claims
- 4835US8860927B2Dual-stage exchange system for lithographic apparatusZHU YU·Filed 2010·Granted Oct 14, 2014·0 cites·4 claims
- 4935US8836918B2Dual-stage exchange system for lithographic apparatusZHU YU·Filed 2010·Granted Sep 16, 2014·0 cites·6 claims
- 5034US9904183B2Coarse motion and fine motion integrated reticle stage driven by planar motorUNIV TSINGHUA·Filed 2015·Granted Feb 27, 2018·0 cites·5 claims
Showing the top 50 of 52 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →