Inventor · disambiguated record
Richard S. Muka
Also filed as: MUKA RICHARD · MUKA RICHARD S · MUKA RICHARD STEPHEN
37 granted patents·4 pending applications·2,628 citations·filing 1976–2011
98Inventor score
Files withBROOKS AUTOMATION INC14VARIAN SEMICONDUCTOR EQUIPMENT10VARIAN ASSOCIATES5EATON CORP3EASTMAN KODAK CO2
Top patents by PatentIndex Score
41 records- 0199US6158941ASubstrate transport apparatus with double substrate holdersBROOKS AUTOMATION INC·Filed 1999·Granted Dec 12, 2000·496 cites·2 claims
- 0298US6079927AAutomated wafer buffer for use with wafer processing equipmentVARIAN SEMICONDUCTOR EQUIPMENT·Filed 1998·Granted Jun 27, 2000·539 cites·28 claims
- 0396US5447431ALow-gas temperature stabilization systemBROOKS AUTOMATION INC·Filed 1993·Granted Sep 5, 1995·52 cites·7 claims
- 0495US6062798AMulti-level substrate processing apparatusBROOKS AUTOMATION INC·Filed 1996·Granted May 16, 2000·171 cites·43 claims
- 0592US4923584ASealing apparatus for a vacuum processing systemEATON CORP·Filed 1988·Granted May 8, 1990·173 cites·15 claims
- 0691US7935942B2Technique for low-temperature ion implantationVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2006·Granted May 3, 2011·16 cites·19 claims
- 0791US4481406AHeater assembly for thermal processing of a semiconductor wafer in a vacuum chamberVARIAN ASSOCIATES·Filed 1983·Granted Nov 6, 1984·42 cites·6 claims
- 0889US7528392B2Techniques for low-temperature ion implantationVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2007·Granted May 5, 2009·12 cites·27 claims
- 0989US5752796AVacuum integrated SMIF systemFiled 1996·Granted May 19, 1998·110 cites·64 claims
- 1088US5588827APassive gas substrate thermal conditioning apparatus and methodBROOKS AUTOMATION INC·Filed 1995·Granted Dec 31, 1996·92 cites·12 claims
- 1188US5520538ALow-gas temperature stabilization systemBROOKS AUTOMATION INC·Filed 1995·Granted May 28, 1996·25 cites·2 claims
- 1288US5019233ASputtering systemEATON CORP·Filed 1989·Granted May 28, 1991·103 cites·12 claims
- 1386US5613821ACluster tool batchloader of substrate carrierBROOKS AUTOMATION INC·Filed 1995·Granted Mar 25, 1997·93 cites·21 claims
- 1484US5664925ABatchloader for load lockBROOKS AUTOMATION INC·Filed 1997·Granted Sep 9, 1997·83 cites·8 claims
- 1584US4952299AWafer handling apparatusEATON CORP·Filed 1988·Granted Aug 28, 1990·107 cites·6 claims
- 1683US8319196B2Technique for low-temperature ion implantationENGLAND JONATHAN G·Filed 2011·Granted Nov 27, 2012·7 cites·20 claims
- 1783US7655933B2Techniques for temperature-controlled ion implantationVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2007·Granted Feb 2, 2010·8 cites·40 claims
- 1883US5854468ASubstrate heating apparatus with cantilevered lifting armBROOKS AUTOMATION INC·Filed 1996·Granted Dec 29, 1998·66 cites·22 claims
- 1982US6299404B1Substrate transport apparatus with double substrate holdersBROOKS AUTOMATION INC·Filed 1996·Granted Oct 9, 2001·55 cites·6 claims
- 2082US5778968AMethod for heating or cooling wafersBROOKS AUTOMATION INC·Filed 1996·Granted Jul 14, 1998·71 cites·8 claims
- 2181US8585115B2Method and apparatus for lifting a horizontally-oriented substrate from a cassetteFAIRHURST JOHN ROBERT·Filed 2011·Granted Nov 19, 2013·6 cites·17 claims
- 2280US5609459ADoor drive mechanisms for substrate carrier and load lockBROOKS AUTOMATION INC·Filed 1995·Granted Mar 11, 1997·63 cites·9 claims
- 2378US8450193B2Techniques for temperature-controlled ion implantationENGLAND JONATHAN GERALD·Filed 2007·Granted May 28, 2013·9 cites·1 claims
- 2478US7993698B2Techniques for temperature controlled ion implantationVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2006·Granted Aug 9, 2011·5 cites·8 claims
- 2578US5607276ABatchloader for substrate carrier on load lockBROOKS AUTOMATION INC·Filed 1995·Granted Mar 4, 1997·60 cites·12 claims
- 2675US6261048B1Multi-level substrate processing apparatusBROOKS AUTOMATION INC·Filed 1999·Granted Jul 17, 2001·38 cites·24 claims
- 2774US6193506B1Apparatus and method for batch thermal conditioning of substratesBROOKS AUTOMATION INC·Filed 1995·Granted Feb 27, 2001·28 cites·30 claims
- 2873US4421306ADocument feeder with improved vacuum systemEASTMAN KODAK CO·Filed 1981·Granted Dec 20, 1983·19 cites·3 claims
- 2970US7595972B2Clamp for use in processing semiconductor workpiecesVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2005·Granted Sep 29, 2009·3 cites·17 claims
- 3063US6863736B2Shaft cooling mechanismsIBIS TECHNOLOGY CORP·Filed 2002·Granted Mar 8, 2005·10 cites·25 claims
- 3157US4417347ASemiconductor processor incorporating blackbody radiation source with constant planar energy fluxVARIAN ASSOCIATES·Filed 1981·Granted Nov 22, 1983·19 cites·8 claims
- 3255US2009140166A1Techniques for low-temperature ion implantationVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2009·Application pending·0 cites
- 3352US5588789ALoad arm for load lockBROOKS AUTOMATION·Filed 1995·Granted Dec 31, 1996·18 cites·21 claims
- 3450US4486652ABlackbody radiation source with constant planar energy fluxVARIAN ASSOCIATES·Filed 1983·Granted Dec 4, 1984·15 cites·2 claims
- 3546US2009017229A1Processing System Platen having a Variable Thermal Conductivity ProfileVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2008·Application pending·0 cites
- 3645US2008121821A1Techniques for low-temperature ion implantationVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2007·Application pending·0 cites
- 3743US2007195482A1Johnsen-Rahbek electrostatic chuck driven with AC voltageVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2006·Application pending·0 cites
- 3842US4070015ASheet feeding apparatusEASTMAN KODAK CO·Filed 1976·Granted Jan 24, 1978·5 cites·5 claims
- 3940US8669540B2System and method for gas leak control in a substrate holderMILLER TIMOTHY J·Filed 2011·Granted Mar 11, 2014·0 cites·17 claims
- 4034US4421479AProcess for treating a semiconductor material by blackbody radiation source with constant planar energy fluxVARIAN ASSOCIATES·Filed 1983·Granted Dec 20, 1983·5 cites·6 claims
- 4133US4433246ABlackbody radiation source for producing constant planar energy fluxVARIAN ASSOCIATES·Filed 1982·Granted Feb 21, 1984·4 cites·3 claims
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