Inventor · disambiguated record
Stephen C. Schultz
Also filed as: SCHULTZ STEPHEN · SCHULTZ STEPHEN C · SCHULTZ STEPHEN CHARLES
22 granted patents·1 pending application·1,100 citations·filing 1993–2006
97Inventor score
Files withSPEEDFAM IPEC CORP16NOVELLUS SYSTEMS INC4INTEGRATED PROCESS EQUIPMENT C1SPEEDFAM IPECA CORP1WESTECH SYSTEMS INC1
Top patents by PatentIndex Score
23 records- 0198US7140956B1Work piece carrier with adjustable pressure zones and barriers and a method of planarizing a work pieceSPEEDFAM IPEC CORP·Filed 2005·Granted Nov 28, 2006·67 cites·7 claims
- 0297US6390905B1Workpiece carrier with adjustable pressure zones and barriersSPEEDFAM IPEC CORP·Filed 2000·Granted May 21, 2002·137 cites·13 claims
- 0397US5643061APneumatic polishing head for CMP apparatusINTEGRATED PROCESS EQUIPMENT C·Filed 1995·Granted Jul 1, 1997·232 cites·20 claims
- 0496US6659850B2Work piece carrier with adjustable pressure zones and barriers and a method of planarizing a work pieceSPEEDFAM IPEC CORP·Filed 2002·Granted Dec 9, 2003·97 cites·21 claims
- 0594US7402098B2Carrier head for workpiece planarization/polishingNOVELLUS SYSTEMS INC·Filed 2006·Granted Jul 22, 2008·31 cites·16 claims
- 0692US6447379B1Carrier including a multi-volume diaphragm for polishing a semiconductor wafer and a method thereforSPEEDFAM IPEC CORP·Filed 2000·Granted Sep 10, 2002·52 cites·10 claims
- 0791US6612903B2Workpiece carrier with adjustable pressure zones and barriersSPEEDFAM IPEC CORP·Filed 2002·Granted Sep 2, 2003·40 cites·16 claims
- 0891US5456627AConditioner for a polishing pad and method thereforWESTECH SYSTEMS INC·Filed 1993·Granted Oct 10, 1995·226 cites·16 claims
- 0988US6932671B1Method for controlling a chemical mechanical polishing (CMP) operationNOVELLUS SYSTEMS INC·Filed 2004·Granted Aug 23, 2005·33 cites·21 claims
- 1086US6540592B1Carrier head with reduced moment wear ringSPEEDFAM IPEC CORP·Filed 2000·Granted Apr 1, 2003·29 cites·24 claims
- 1179US6878039B2Polishing pad window for a chemical-mechanical polishing toolSPEEDFAM IPEC CORP·Filed 2002·Granted Apr 12, 2005·20 cites·26 claims
- 1278US7335092B1Carrier head for workpiece planarization/polishingNOVELLUS SYSTEMS INC·Filed 2006·Granted Feb 26, 2008·7 cites·25 claims
- 1378US6758939B2Laminated wear ringSPEEDFAM IPEC CORP·Filed 2001·Granted Jul 6, 2004·22 cites·18 claims
- 1475US6184139B1Oscillating orbital polisher and methodSPEEDFAM IPEC CORP·Filed 1998·Granted Feb 6, 2001·33 cites·27 claims
- 1574US6599175B2Apparatus for distributing a fluid through a polishing padSPEEDFAM IPECA CORP·Filed 2001·Granted Jul 29, 2003·18 cites·15 claims
- 1673US7025664B2Work piece carrier with adjustable pressure zones and barriers and a method of planarizing a work pieceSPEEDFAM IPEC CORP·Filed 2004·Granted Apr 11, 2006·10 cites·7 claims
- 1768US6500055B1Oscillating orbital polisher and methodSPEEDFAM IPEC CORP·Filed 2000·Granted Dec 31, 2002·21 cites·6 claims
- 1864US6336853B1Carrier having pistons for distributing a pressing force on the back surface of a workpieceSPEEDFAM IPEC CORP·Filed 2000·Granted Jan 8, 2002·10 cites·13 claims
- 1960US6790123B2Method for processing a work piece in a multi-zonal processing apparatusSPEEDFAM IPEC CORP·Filed 2002·Granted Sep 14, 2004·7 cites·20 claims
- 2052US6568991B2Method and apparatus for sensing a wafer in a carrierSPEEDFAM IPEC CORP·Filed 2001·Granted May 27, 2003·4 cites·40 claims
- 2149US7014541B2Work piece carrier with adjustable pressure zones and barriers and a method of planarizing a work pieceSPEEDFAM IPEC CORP·Filed 2003·Granted Mar 21, 2006·1 cites·7 claims
- 2248US7040957B2Platen and manifold for polishing workpiecesNOVELLUS SYSTEMS INC·Filed 2003·Granted May 9, 2006·3 cites·9 claims
- 2338US2003077986A1Front-reference carrier on orbital solid platenSPEEDFAM IPEC CORP·Filed 2002·Application pending·0 cites
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