Inventor · disambiguated record
Ben-Ming Benjamin Tsai
Also filed as: TSAI BEN · TSAI BEN-MING BENJAMIN
6 granted patents·135 citations·filing 2000–2020
84Inventor score
Top patents by PatentIndex Score
6 records- 0196US7557921B1Apparatus and methods for optically monitoring the fidelity of patterns produced by photolitographic toolsKLA TENCOR TECH CORP·Filed 2005·Granted Jul 7, 2009·55 cites·14 claims
- 0292US7009704B1Overlay error detectionKLA TENCOR TECH CORP·Filed 2000·Granted Mar 7, 2006·46 cites·90 claims
- 0391US9645097B2In-line wafer edge inspection, wafer pre-alignment, and wafer cleaningKLA TENCOR CORP·Filed 2015·Granted May 9, 2017·10 cites·21 claims
- 0490US7375810B2Overlay error detectionKLA TENCOR CORP·Filed 2005·Granted May 20, 2008·21 cites·35 claims
- 0583US10739275B2Simultaneous multi-directional laser wafer inspectionKLA TENCOR CORP·Filed 2017·Granted Aug 11, 2020·3 cites·22 claims
- 0655US11366069B2Simultaneous multi-directional laser wafer inspectionKLA TENCOR CORP·Filed 2020·Granted Jun 21, 2022·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →