Inventor · disambiguated record
Jon Mcchesney
Also filed as: MCCHESNEY JON · MCCHESNEY JON M
33 granted patents·7 pending applications·350 citations·filing 2000–2025
96Inventor score
Top patents by PatentIndex Score
40 records- 0198US10410836B2Systems and methods for tuning to reduce reflected power in multiple statesLAM RES CORP·Filed 2018·Granted Sep 10, 2019·30 cites·20 claims
- 0297US10062599B2Automated replacement of consumable parts using interfacing chambersLAM RES CORP·Filed 2016·Granted Aug 28, 2018·30 cites·24 claims
- 0396US10124492B2Automated replacement of consumable parts using end effectors interfacing with plasma processing systemLAM RES CORP·Filed 2016·Granted Nov 13, 2018·25 cites·26 claims
- 0495US6962644B2Tandem etch chamber plasma processing systemAPPLIED MATERIALS INC·Filed 2002·Granted Nov 8, 2005·108 cites·35 claims
- 0593US6494958B1Plasma chamber support with coupled electrodeAPPLIED MATERIALS INC·Filed 2000·Granted Dec 17, 2002·74 cites·20 claims
- 0691US10957521B2Image based plasma sheath profile detection on plasma processing toolsLAM RES CORP·Filed 2018·Granted Mar 23, 2021·6 cites·10 claims
- 0791US10658222B2Moveable edge coupling ring for edge process control during semiconductor wafer processingLAM RES CORP·Filed 2015·Granted May 19, 2020·7 cites·18 claims
- 0891US10541168B2Edge ring centering method using ring dynamic alignment dataLAM RES CORP·Filed 2017·Granted Jan 21, 2020·9 cites·19 claims
- 0989US8522716B2Protective coating for a plasma processing chamber part and a method of useKADKHODAYAN BOBBY·Filed 2009·Granted Sep 3, 2013·21 cites·16 claims
- 1084US12183554B2Bottom and middle edge ringsLAM RES CORP·Filed 2022·Granted Dec 31, 2024·1 cites·8 claims
- 1184US10427307B2Automated replacement of consumable parts using end effectors interfacing with plasma processing systemLAM RES CORP·Filed 2017·Granted Oct 1, 2019·3 cites·15 claims
- 1283US9885493B2Air cooled faraday shield and methods for using the sameLAM RES CORP·Filed 2013·Granted Feb 6, 2018·4 cites·21 claims
- 1382US11011353B2Systems and methods for performing edge ring characterizationLAM RES CORP·Filed 2017·Granted May 18, 2021·3 cites·18 claims
- 1482US2024355667A1Edge ring arrangement with moveable edge ringsLAM RES CORP·Filed 2024·Application pending·0 cites
- 1581US11887819B2Systems for cooling RF heated chamber componentsLAM RES CORP·Filed 2022·Granted Jan 30, 2024·0 cites·17 claims
- 1681US10304717B2Automated replacement of consumable parts using interfacing chambersLAM RES CORP·Filed 2017·Granted May 28, 2019·2 cites·20 claims
- 1780US9978565B2Systems for cooling RF heated chamber componentsMCCHESNEY JON·Filed 2011·Granted May 22, 2018·4 cites·20 claims
- 1878US9530656B2Temperature control in RF chamber with heater and air amplifierLAM RES CORP·Filed 2013·Granted Dec 27, 2016·3 cites·16 claims
- 1975US2025132135A1Bottom and middle edge ringsLAM RES CORP·Filed 2024·Application pending·0 cites
- 2074US11605546B2Moveable edge coupling ring for edge process control during semiconductor wafer processingLAM RES CORP·Filed 2015·Granted Mar 14, 2023·2 cites·10 claims
- 2174US6727655B2Method and apparatus to monitor electrical states at a workpiece in a semiconductor processing chamberFiled 2001·Granted Apr 27, 2004·17 cites·22 claims
- 2273US11495441B2Systems for cooling RF heated chamber componentsLAM RES CORP·Filed 2020·Granted Nov 8, 2022·0 cites·20 claims
- 2372US12027410B2Edge ring arrangement with moveable edge ringsLAM RES CORP·Filed 2021·Granted Jul 2, 2024·0 cites·18 claims
- 2472US11692732B2Air cooled faraday shield and methods for using the sameLAM RES CORP·Filed 2020·Granted Jul 4, 2023·0 cites·10 claims
- 2563US10825661B2Systems for cooling RF heated chamber componentsLAM RES CORP·Filed 2018·Granted Nov 3, 2020·0 cites·19 claims
- 2663US10770339B2Automated replacement of consumable parts using interfacing chambersLAM RES CORP·Filed 2019·Granted Sep 8, 2020·0 cites·20 claims
- 2763US8143904B2System and method for testing an electrostatic chuckSHIH HONG·Filed 2008·Granted Mar 27, 2012·1 cites·10 claims
- 2862US10690374B2Air cooled faraday shield and methods for using the sameLAM RES CORP·Filed 2018·Granted Jun 23, 2020·0 cites·15 claims
- 2961US10651013B2Systems and methods for tuning to reduce reflected power in multiple statesLAM RES CORP·Filed 2019·Granted May 12, 2020·0 cites·20 claims
- 3059US2019013232A1Moveable edge ring designLAM RES CORP·Filed 2018·Application pending·0 cites
- 3154US10600620B2Temperature control in RF chamber with heater and air amplifierLAM RES CORP·Filed 2016·Granted Mar 24, 2020·0 cites·9 claims
- 3253US12237154B2Bottom and middle edge ringsLAM RES CORP·Filed 2017·Granted Feb 25, 2025·0 cites·4 claims
- 3352US2025372355A1Moveable edge ring designsLAM RES CORP·Filed 2025·Application pending·0 cites
- 3451US10242844B2Rotating RF electric field antenna for uniform plasma generationLAM RES CORP·Filed 2014·Granted Mar 26, 2019·0 cites·14 claims
- 3551US9082805B2System and method for testing an electrostatic chuckSHIH HONG·Filed 2012·Granted Jul 14, 2015·0 cites·6 claims
- 3651US2014065835A1Protective coating for a plasma processing chamber part and a method of useLAM RES CORP·Filed 2013·Application pending·0 cites
- 3742US12230482B2Moveable edge ring designsLAM RES CORP·Filed 2017·Granted Feb 18, 2025·0 cites·26 claims
- 3839US2005016465A1Electrostatic chuck having electrode with rounded edgeAPPLIED MATERIALS INC·Filed 2003·Application pending·0 cites
- 3938US2017263478A1Detection System for Tunable/Replaceable Edge Coupling RingLAM RES CORP·Filed 2017·Application pending·0 cites
- 4031US9679751B2Chamber filler kit for plasma etch chamber useful for fast gas switchingMCCHESNEY JON·Filed 2012·Granted Jun 13, 2017·0 cites·11 claims
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