Inventor · disambiguated record
Takayuki Yabu
Also filed as: YABU TAKAYUKI
53 granted patents·12 pending applications·204 citations·filing 2000–2024
98Inventor score
Top patents by PatentIndex Score
65 records- 0194US8497489B2Chamber apparatus and method of maintaining target supply unitYABU TAKAYUKI·Filed 2011·Granted Jul 30, 2013·16 cites·4 claims
- 0292US10303061B2Extreme ultraviolet light generation deviceGIGAPHOTON INC·Filed 2018·Granted May 28, 2019·5 cites·20 claims
- 0391US7903700B2Narrow-spectrum laser deviceKOMATSU MFG CO LTD·Filed 2005·Granted Mar 8, 2011·17 cites·3 claims
- 0490US6810061B2Discharge electrode and discharge electrode manufacturing methodKOMATSU MFG CO LTD·Filed 2002·Granted Oct 26, 2004·32 cites·20 claims
- 0589US10102938B2Extreme ultraviolet light generating apparatusGIGAPHOTON INC·Filed 2018·Granted Oct 16, 2018·5 cites·20 claims
- 0689US8610095B2Extreme ultraviolet light source deviceYABU TAKAYUKI·Filed 2010·Granted Dec 17, 2013·12 cites·13 claims
- 0788US10085334B2Extreme ultraviolet light generating systemGIGAPHOTON INC·Filed 2018·Granted Sep 25, 2018·3 cites·20 claims
- 0888US7923705B2Extreme ultra violet light source apparatusGIGAPHOTON INC·Filed 2009·Granted Apr 12, 2011·25 cites·30 claims
- 0987US10225918B2Extreme ultraviolet light generating apparatusGIGAPHOTON INC·Filed 2018·Granted Mar 5, 2019·3 cites·14 claims
- 1087US10057972B2Extreme ultraviolet light generation system and method of generating extreme ultraviolet lightGIGAPHOTON INC·Filed 2017·Granted Aug 21, 2018·5 cites·15 claims
- 1180US8698112B2Extreme ultraviolet light generation apparatusYABU TAKAYUKI·Filed 2012·Granted Apr 15, 2014·5 cites·12 claims
- 1279US10172224B2Extreme UV light generatorGIGAPHOTON INC·Filed 2016·Granted Jan 1, 2019·2 cites·20 claims
- 1378US10271414B2Droplet detector and extreme ultraviolet light generating apparatusGIGAPHOTON INC·Filed 2017·Granted Apr 23, 2019·2 cites·8 claims
- 1476US10609803B2Extreme ultraviolet (EUV) light generating apparatus and control method for centroid of EUV lightGIGAPHOTON INC·Filed 2019·Granted Mar 31, 2020·1 cites·13 claims
- 1576US10141186B2Target image-capture device, extreme-ultraviolet-light generation device, and extreme-ultraviolet-light generation systemGIGAPHOTON INC·Filed 2017·Granted Nov 27, 2018·2 cites·19 claims
- 1675US10225917B2Target supply device and extreme ultraviolet light generating deviceGIGAPHOTON INC·Filed 2018·Granted Mar 5, 2019·2 cites·20 claims
- 1775US8604451B2Target supply apparatusYABU TAKAYUKI·Filed 2009·Granted Dec 10, 2013·10 cites·26 claims
- 1875US8173984B2Extreme ultraviolet light source apparatusMORIYA MASATO·Filed 2009·Granted May 8, 2012·8 cites·27 claims
- 1973US6570899B1Gas laser deviceKOMATSU MFG CO LTD·Filed 2000·Granted May 27, 2003·12 cites·2 claims
- 2072US10842010B2Extreme ultraviolet light generation systemGIGAPHOTON INC·Filed 2019·Granted Nov 17, 2020·1 cites·15 claims
- 2172US8294129B2Extreme ultraviolet light source apparatusMORIYA MASATO·Filed 2011·Granted Oct 23, 2012·3 cites·7 claims
- 2269US10531551B2Extreme ultraviolet light generating apparatusGIGAPHOTON INC·Filed 2018·Granted Jan 7, 2020·1 cites·20 claims
- 2369US10054861B2Extreme ultraviolet light generating apparatus and method for generating extreme ultraviolet lightGIGAPHOTON INC·Filed 2017·Granted Aug 21, 2018·1 cites·17 claims
- 2468US9661730B2Extreme ultraviolet light generation apparatus with a gas supply toward a trajectory of a targetGIGAPHOTON INC·Filed 2016·Granted May 23, 2017·1 cites·6 claims
- 2568US8710472B2Target output device and extreme ultraviolet light source apparatusISHIHARA TAKANOBU·Filed 2011·Granted Apr 29, 2014·3 cites·21 claims
- 2666US2024186760A1Laser apparatus and electronic device manufacturing methodGIGAPHOTON INC·Filed 2024·Application pending·0 cites
- 2765US9949354B2Extreme UV light generation apparatus and methodGIGAPHOTON INC·Filed 2015·Granted Apr 17, 2018·1 cites·18 claims
- 2865US7732794B2Extreme ultra violet light source apparatusKOMATSU MFG CO LTD·Filed 2008·Granted Jun 8, 2010·6 cites·11 claims
- 2964US11553583B2Extreme ultraviolet light generation system and electronic device manufacturing methodGIGAPHOTON INC·Filed 2021·Granted Jan 10, 2023·0 cites·18 claims
- 3063US8450706B2Extreme ultraviolet light source apparatusABE TAMOTSU·Filed 2009·Granted May 28, 2013·6 cites·16 claims
- 3162US8779402B2Target supply deviceGIGAPHOTON INC·Filed 2012·Granted Jul 15, 2014·1 cites·10 claims
- 3258US10869378B2Target measuring apparatus and extreme ultraviolet light generation apparatusGIGAPHOTON INC·Filed 2019·Granted Dec 15, 2020·0 cites·20 claims
- 3358US8841639B2Control method for target supply device, and target supply deviceGIGAPHOTON INC·Filed 2013·Granted Sep 23, 2014·1 cites·6 claims
- 3458US8343429B2Target supply unit of extreme ultraviolet light source apparatus and method of manufacturing the sameGIGAPHOTON INC·Filed 2009·Granted Jan 1, 2013·3 cites·15 claims
- 3557US7683355B2Extreme ultra violet light source apparatusKOMATSU MFG CO LTD·Filed 2007·Granted Mar 23, 2010·4 cites·9 claims
- 3656US6771685B1Discharge electrodes connecting structure for laser apparatus and laser apparatus therewithKOMATSU MFG CO LTD·Filed 2000·Granted Aug 3, 2004·4 cites·2 claims
- 3755US11778721B2Extreme ultraviolet light generation system and electronic device manufacturing methodGIGAPHOTON INC·Filed 2021·Granted Oct 3, 2023·0 cites·20 claims
- 3851US12332575B2Target supply system, extreme ultraviolet light generation apparatus, and electronic device manufacturing methodGIGAPHOTON INC·Filed 2023·Granted Jun 17, 2025·0 cites·18 claims
- 3951US11043784B2Laser apparatus and EUV light generation systemGIGAPHOTON INC·Filed 2019·Granted Jun 22, 2021·0 cites·15 claims
- 4049US10251254B2Extreme ultraviolet light generating apparatus and control method for centroid of extreme ultraviolet lightGIGAPHOTON INC·Filed 2018·Granted Apr 2, 2019·0 cites·25 claims
- 4149US2013277452A1Chamber apparatus and method of maintaining target supply unitGIGAPHOTON INC·Filed 2013·Application pending·0 cites
- 4247US6490310B1Laser discharge electrodes with current return plate structureKOMATSU MFG CO LTD·Filed 2000·Granted Dec 3, 2002·1 cites·4 claims
- 4347US2012311969A1Target supply unit of extreme ultraviolet light source apparatus and method of manufacturing the sameYABU TAKAYUKI·Filed 2012·Application pending·0 cites
- 4446US10908429B2Extreme ultraviolet light generation system, laser beam size controlling method, and electronic device manufacturing methodGIGAPHOTON INC·Filed 2020·Granted Feb 2, 2021·0 cites·20 claims
- 4545US11924954B2Extreme ultraviolet light generation apparatus and electronic device manufacturing methodGIGAPHOTON INC·Filed 2021·Granted Mar 5, 2024·0 cites·18 claims
- 4645US9097434B2Target supply apparatus and target supply methodGIGAPHOTON INC·Filed 2013·Granted Aug 4, 2015·0 cites·14 claims
- 4745US8779401B2Target supply unitMIZOGUCHI HAKARU·Filed 2012·Granted Jul 15, 2014·0 cites·12 claims
- 4845US2019289707A1Extreme ultraviolet light generation systemGIGAPHOTON INC·Filed 2019·Application pending·0 cites
- 4945US2013032640A1Target supply unit, mechanism for cleaning nozzle thereof, and method for cleaning the nozzleGIGAPHOTON INC·Filed 2012·Application pending·0 cites
- 5043US11219116B1Extreme ultraviolet light generation system and electronic device manufacturing methodGIGAPHOTON INC·Filed 2021·Granted Jan 4, 2022·0 cites·20 claims
Showing the top 50 of 65 patent records by PatentIndex Score.
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