Chamber apparatus and method of maintaining target supply unit

Abstract

A chamber apparatus used with a laser apparatus may include: a chamber provided with at least one inlet for introducing thereinto a laser beam outputted from the laser apparatus; a target supply unit provided to the chamber for supplying a target material to a predetermined region in the chamber; a recovery control unit for instructing the target supply unit to execute recovery operation if a predetermined condition is met; a recovery unit for executing the recovery operation in response to the instruction from the recovery control unit; and a position measuring unit for measuring a position of the target material supplied from the target supply unit into the chamber.

1 - 30 . (canceled) 
     
     
         31 . A chamber apparatus used with a laser apparatus, comprising:
 a chamber provided with at least one inlet for introducing thereinto a laser beam outputted from the laser apparatus;   a target supply unit provided to the chamber for supplying a target material to a predetermined region in the chamber; and   a position measuring unit for measuring a position of the target material supplied from the target supply unit into the chamber, wherein   the target supply unit includes a nozzle, and a remover which is configured to remove a foreign matter adhering to the nozzle or an intermediate structure provided to face the nozzle.   
     
     
         32 . The chamber apparatus according to  claim 31 , further comprising
 a recovery control unit for instructing the target supply unit to execute recovery operation if a predetermined condition is met; and   a recovery unit for executing the recovery operation in response to the instruction from the recovery control unit, wherein   a measurement result by the position measuring unit is inputted to the recovery control unit, and   the predetermined condition is that a position of the target material supplied into the chamber is in a predetermined position range.   
     
     
         33 . The chamber apparatus according to  claim 31 , further comprising
 a recovery control unit for instructing the target supply unit to execute recovery operation if a predetermined condition is met; and   a recovery unit for executing the recovery operation in response to the instruction from the recovery control unit, wherein   the recovery control unit determines whether or not it is timing at which the recovery operation is executed if the predetermined condition is met, and instructs the recovery unit to execute the recovery operation if it is determined that it is the timing at which the recovery operation is executed.   
     
     
         34 . The chamber apparatus according to  claim 31 , further comprising:
 a recovery control unit for instructing the target supply unit to execute recovery operation if a predetermined condition is met; and   a recovery unit for executing the recovery operation in response to the instruction from the recovery control unit, wherein   the recovery unit includes a vibrator provided at the nozzle, and a power supply connected to the vibrator.   
     
     
         35 . The chamber apparatus according to  claim 31 , further comprising:
 a recovery control unit for instructing the target supply unit to execute recovery operation if a predetermined condition is met; and   a recovery unit for executing the recovery operation in response to the instruction from the recovery control unit, wherein   the recovery unit includes a heater provided at the nozzle, and a power supply connected to the heater.   
     
     
         36 . The chamber apparatus according to  claim 31 , further comprising:
 a recovery control unit for instructing the target supply unit to execute recovery operation if a predetermined condition is met; and   a recovery unit for executing the recovery operation in response to the instruction from the recovery control unit, wherein   the intermediate structure is provided at the target supply unit, the intermediate structure being arranged so as to be located between the target supply unit and the predetermined region in the chamber, and   the recovery unit includes a heater provided at the intermediate structure, and a power supply connected to the heater.   
     
     
         37 . The chamber apparatus according to  claim 31 , further comprising:
 a recovery control unit for instructing the target supply unit to execute recovery operation if a predetermined condition is met; and   a recovery unit for executing the recovery operation in response to the instruction from the recovery control unit, wherein   a heater and the intermediate structure are provided at the target supply unit, the intermediate structure being arranged so as to be located between the target supply unit and the predetermined region in the chamber, and   the recovery unit includes a heating pipe provided at the intermediate structure, and a channel for providing communication between the heating pipe and the interior of the target supply unit.   
     
     
         38 . The chamber apparatus according to  claim 31 , further comprising:
 a recovery control unit for instructing the target supply unit to execute recovery operation if a predetermined condition is met; and   a recovery unit for executing the recovery operation in response to the instruction from the recovery control unit, wherein   the intermediate structure is provided at the target supply unit, the intermediate structure being arranged so as to be located between the target supply unit and the predetermined region in the chamber, and   the recovery unit includes an electromagnetic wave source for outputting an electromagnetic wave toward the intermediate structure.   
     
     
         39 . The chamber apparatus according to  claim 31 , further comprising:
 a recovery control unit for instructing the target supply unit to execute recovery operation if a predetermined condition is met; and   a recovery unit for executing the recovery operation in response to the instruction from the recovery control unit, wherein   the intermediate structure is provided at the target supply unit, the intermediate structure being arranged so as to be located between the target supply unit and the predetermined region in the chamber, and   the recovery unit includes at least one gas pipe provided at the intermediate structure, and a gas source connected to the at least one gas pipe.   
     
     
         40 . The chamber apparatus according to  claim 31 , further comprising:
 a recovery control unit for instructing the target supply unit to execute recovery operation if a predetermined condition is met; and   a recovery unit for executing the recovery operation in response to the instruction from the recovery control unit, wherein   the intermediate structure is provided at the target supply unit, the intermediate structure being arranged so as to be located between the target supply unit and the predetermined region in the chamber, and   the recovery unit includes at least one gas pipe arranged between the intermediate structure and an end of the target supply unit, and a gas source connected to the at least one gas pipe.   
     
     
         41 . The chamber apparatus according to  claim 31 , further comprising:
 a recovery control unit for instructing the target supply unit to execute recovery operation if a predetermined condition is met; and   a recovery unit for executing the recovery operation in response to the instruction from the recovery control unit, wherein   the recovery unit includes a cover unit for airtightly defining a predetermined space around the nozzle, a gas supply unit for supplying inert gas into the predetermined space, and an open/close mechanism for opening and closing the cover unit.   
     
     
         42 . The chamber apparatus according to  claim 41 , wherein the gas supply unit supplies the gas into the predetermined space such that pressure in the predetermined space becomes higher than pressure in the target supply unit. 
     
     
         43 . The chamber apparatus according to  claim 41 , wherein a trap for trapping the foreign matter is provided in the target supply unit. 
     
     
         44 . The chamber apparatus according to  claim 31 , further comprising:
 a recovery control unit for instructing the target supply unit to execute recovery operation if a predetermined condition is met; and   a recovery unit for executing the recovery operation in response to the instruction from the recovery control unit, wherein   the recovery unit includes a suction tube provided so as to penetrate through a wall portion of the target supply unit and having one end extending to an area near the nozzle, and a suction pump provided at the other end of the suction tube.   
     
     
         45 . The chamber apparatus according to  claim 44 , wherein the recovery unit further includes a collection tank provided at the other end. 
     
     
         46 . The chamber apparatus according to  claim 31 , wherein the target supply unit includes a pressure control unit for controlling pressure in the target supply unit, and a gas supply unit for supplying gas into the target supply unit. 
     
     
         47 . The chamber apparatus according to  claim 31 , wherein
 the intermediate structure is provided at the target supply unit, the intermediate structure being arranged so as to be located between the target supply unit and the predetermined region in the chamber, and   at least a surface of the intermediate structure is configured of a material with low wettability to the intermediate structure.   
     
     
         48 . The chamber apparatus according to  claim 47 , wherein the intermediate structure is provided such that the surface thereof is inclined with respect to the gravity direction. 
     
     
         49 . The chamber apparatus according to  claim 47 , wherein the material is a material containing at least any of molybdenum (Mo), tungsten (W), tantalum (Ta), titanium (Ti), stainless steel, diamond, silicon carbide, silicon nitride, aluminum oxide, zirconium oxide, diamond, silicon oxide, molybdenum oxide, tantalum oxide, and tungsten oxide. 
     
     
         50 . The chamber apparatus according to  claim 31 , wherein the chamber includes a trap unit movably arranged between the target supply unit and the predetermined region in the chamber, and a motor connected to the trap unit. 
     
     
         51 . The chamber apparatus according to  claim 50 , wherein the motor moves the trap unit to a first position when the recovery operation is executed, and moves the trap unit to a second position when the recovery operation is not executed. 
     
     
         52 . The chamber apparatus according to  claim 31 , wherein the chamber includes a collector mirror for collecting extreme ultraviolet light emitted when the target material is irradiated with the laser beam in the chamber, a mirror protection unit movably disposed at a reflection surface side of the collector mirror, and a motor connected to the mirror protection unit. 
     
     
         53 . The chamber apparatus according to  claim 52 , wherein the motor moves the mirror protection unit to a third position when the recovery operation is executed, and moves the mirror protection unit to a fourth position when the recovery operation is not executed.