Inventor · disambiguated record
Joachim Mai
Also filed as: MAI JOACHIM
7 granted patents·8 pending applications·29 citations·filing 2004–2019
79Inventor score
Top patents by PatentIndex Score
15 records- 0181US9431217B2Microwave plasma generating device and method for operating sameMEYER BURGER (GERMANY) AG·Filed 2013·Granted Aug 30, 2016·11 cites·18 claims
- 0281US9224581B2Parallel plate reactor for uniform thin film deposition with reduced tool foot-printMAI JOACHIM·Filed 2010·Granted Dec 29, 2015·12 cites·10 claims
- 0376US10685813B2Plasma treatment device with two microwave plasma sources coupled to one another, and method for operating a plasma treatment device of this kindMEYER BURGER GERMANY GMBH·Filed 2017·Granted Jun 16, 2020·3 cites·17 claims
- 0472US9984857B2Plasma generation deviceMEYER BURGER GERMANY AG·Filed 2014·Granted May 29, 2018·3 cites·13 claims
- 0556US2013243966A1Method and device for ion implantationSCHETT UWE·Filed 2011·Application pending·0 cites
- 0645US2019390344A1Process moduleMEYER BURGER GERMANY GMBH·Filed 2019·Application pending·0 cites
- 0741US2016181070A1Device for ion implantationROTH & RAU AG·Filed 2016·Application pending·0 cites
- 0840US9556517B2Gas separationROTH & RAU AG·Filed 2013·Granted Jan 31, 2017·0 cites·18 claims
- 0938US2016237555A1Multi-Magnetron ArrangementMEYER BURGER (GERMANY) AG·Filed 2014·Application pending·0 cites
- 1035US2009242131A1Ecr plasma sourceROTH & RAU AG·Filed 2007·Application pending·0 cites
- 1134US2015152555A1Process moduleROTH & RAU AG·Filed 2013·Application pending·0 cites
- 1233US10199250B2Substrate processing deviceMEYER BURGER GERMANY GMBH·Filed 2013·Granted Feb 5, 2019·0 cites·23 claims
- 1333US2006254521A1Electron cyclotron resonance (ecr) plasma source having a linear plasma discharge openingMAI JOACHIM·Filed 2004·Application pending·0 cites
- 1431US8790498B2Method and device for ion beam processing of surfacesMAI JOACHIM·Filed 2004·Granted Jul 29, 2014·0 cites·12 claims
- 1524US2018294135A1Device for the Extraction of Electrical Charge Carriers from a Charge Carrier Generation Space and Method for Operating Such a DeviceMEYER BURGER GERMANY AG·Filed 2016·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →