Assignee
MAI JOACHIM
DE·2 granted patents·1 pending application·12 citations·filing 2004–2010
Top patents by PatentIndex Score
3 records- 0181US9224581B2Parallel plate reactor for uniform thin film deposition with reduced tool foot-printMAI JOACHIM·Filed 2010·Granted Dec 29, 2015·12 cites·10 claims
- 0233US2006254521A1Electron cyclotron resonance (ecr) plasma source having a linear plasma discharge openingMAI JOACHIM·Filed 2004·Application pending·0 cites
- 0331US8790498B2Method and device for ion beam processing of surfacesMAI JOACHIM·Filed 2004·Granted Jul 29, 2014·0 cites·12 claims
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