Inventor · disambiguated record
Marek Zywno
Also filed as: ZYWNO MAREK
17 granted patents·1 pending application·1,280 citations·filing 1994–2013
95Inventor score
Top patents by PatentIndex Score
18 records- 0199US5572598AAutomated photomask inspection apparatusKLA INSTR CORP·Filed 1994·Granted Nov 5, 1996·294 cites·49 claims
- 0298US7897942B1Dynamic tracking of wafer motion and distortion during lithographyKLA TENCOR CORP·Filed 2008·Granted Mar 1, 2011·56 cites·28 claims
- 0398US5563702AAutomated photomask inspection apparatus and methodKLA INSTR CORP·Filed 1994·Granted Oct 8, 1996·386 cites·41 claims
- 0497US6363166B1Automated photomask inspection apparatusKLA TENCOR CORP·Filed 2000·Granted Mar 26, 2002·94 cites·32 claims
- 0597US6052478AAutomated photomask inspection apparatusKLA TENCOR CORP·Filed 1996·Granted Apr 18, 2000·166 cites·46 claims
- 0696US5737072AAutomated photomask inspection apparatus and methodKLA INSTR CORP·Filed 1996·Granted Apr 7, 1998·221 cites·41 claims
- 0783US7633070B2Substrate processing apparatus and methodKLA TENCOR TECH CORP·Filed 2007·Granted Dec 15, 2009·8 cites·50 claims
- 0878US6698735B2Fluid bearings and vacuum chucks and methods for producing sameFiled 2002·Granted Mar 2, 2004·10 cites·7 claims
- 0974US6584218B2Automated photomask inspection apparatusKLA TENCOR CORP·Filed 2001·Granted Jun 24, 2003·8 cites·1 claims
- 1073US8058628B2Substrate processing apparatus and methodZYWNO MAREK·Filed 2008·Granted Nov 15, 2011·4 cites·69 claims
- 1173US7342238B2Systems, control subsystems, and methods for projecting an electron beam onto a specimenKLA TENCOR TECH CORP·Filed 2005·Granted Mar 11, 2008·4 cites·23 claims
- 1270US9298106B1Wafer stage with reciprocating wafer stage actuation controlUMMETHALA UPENDRA·Filed 2012·Granted Mar 29, 2016·3 cites·26 claims
- 1356US5989444AFluid bearings and vacuum chucks and methods for producing sameFiled 1998·Granted Nov 23, 1999·13 cites·22 claims
- 1455US6516517B2Fluid bearings and vacuum chucks and methods for producing sameFiled 2001·Granted Feb 11, 2003·3 cites·11 claims
- 1554US9141002B2Z-stage with dynamically driven stage mirror and chuck assembly having constraintKLA TENCOR CORP·Filed 2013·Granted Sep 22, 2015·0 cites·13 claims
- 1650US6990737B2Fluid bearings and vacuum chucks and methods for producing sameZYWNO MAREK·Filed 2004·Granted Jan 31, 2006·6 cites·17 claims
- 1741US2013105108A1Heat Removal From Substrates In VacuumKLA TENCOR CORP·Filed 2012·Application pending·0 cites
- 1840US6390677B1Fluid bearings and vacuum chucks and methods for producing sameFiled 1999·Granted May 21, 2002·4 cites·6 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →