Inventor · disambiguated record
Ramkumar Karur-Shanmugam
Also filed as: KARUR-SHANMUGAM RAMKUMAR
2 granted patents·6 citations·filing 2014–2017
50Inventor score
Files withKLA TENCOR CORP2
Top patents by PatentIndex Score
2 records- 0178US10466596B2System and method for field-by-field overlay process control using measured and estimated field parametersKLA TENCOR CORP·Filed 2014·Granted Nov 5, 2019·4 cites·21 claims
- 0267US10340165B2Systems and methods for automated multi-zone detection and modelingKLA TENCOR CORP·Filed 2017·Granted Jul 2, 2019·2 cites·34 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →