Inventor · disambiguated record
Tsuguo Kitajima
Also filed as: KITAJIMA TSUGUO
1 granted patent·3 pending applications·0 citations·filing 2009–2016
13Inventor score
Technology areasH10P
Top patents by PatentIndex Score
4 records- 0141US10081090B2Method of manufacturing an upper electrode of a plasma processing deviceTOKYO ELECTRON LTD·Filed 2016·Granted Sep 25, 2018·0 cites·6 claims
- 0240US2010116436A1Ring-shaped member and method for manufacturing sameTOKYO ELECTRON LTD·Filed 2009·Application pending·0 cites
- 0334US2011247759A1Focus ring and substrate mounting systemTOKYO ELECTRON LTD·Filed 2011·Application pending·0 cites
- 0434US2014174662A1Plasma processing deviceKITAJIMA TSUGUO·Filed 2012·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →