Focus ring and substrate mounting system

Abstract

A focus ring surrounds an outer periphery of a substrate mounted on a mounting table having a temperature control mechanism and includes a contact surface which comes into contact with the mounting table and a heat transfer sheet formed on the contact surface. The heat transfer sheet contains an organic material and a heat transfer material mixed with the organic material, and has a film thickness larger than or equal to about 40 μm and smaller than about 100 μm.

1 . A focus ring which surrounds an outer periphery of a substrate mounted on a mounting table having a temperature control mechanism, the focus ring comprising:
 a contact surface which comes into contact with the mounting table; and   a heat transfer sheet formed on the contact surface,   wherein the heat transfer sheet contains an organic material and a heat transfer material mixed with the organic material, and has a film thickness larger than or equal to about 40 μm and smaller than about 100 μm.   
     
     
         2 . The focus ring of  claim 1 , wherein thermal conductivity of the heat transfer sheet is within a range of about 0.5 to 5.0 W/m·K; the organic material is a heat-resistant adhesive or rubber containing silicon; the heat transfer material is an oxide, a nitride or a carbide ceramic filler; and the filler is contained in the heat-resistant adhesive or rubber at about 25 to 60 vol %. 
     
     
         3 . A substrate mounting system comprising:
 a mounting table for mounting thereon a substrate on which a predetermined process is performed; and   a focus ring surrounding an outer periphery of the substrate mounted on the mounting table;   wherein the mounting table includes a temperature control mechanism, and wherein the focus ring has a contact surface which comes into contact with the mounting table and a heat transfer sheet formed on the contact surface, the heat transfer sheet containing an organic material and a heat transfer material mixed with the organic material and having a film thickness larger than or equal to about 40 μm and smaller than about 100 μm.