Inventor · disambiguated record
Kaupo Kukli
Also filed as: KUKLI KAUPO
3 granted patents·1 pending application·329 citations·filing 2000–2006
76Inventor score
Top patents by PatentIndex Score
4 records- 0197US6632279B1Method for growing thin oxide filmsASM MICROCHEMISTRY OY·Filed 2000·Granted Oct 14, 2003·314 cites·7 claims
- 0272US7377976B2Method for growing thin oxide filmsRITALA MIKKO·Filed 2005·Granted May 27, 2008·4 cites·25 claims
- 0372US6932867B2Method for growing thin oxide filmsASM INT·Filed 2003·Granted Aug 23, 2005·11 cites·18 claims
- 0438US2011198756A1Organometallic Precursors and Related Intermediates for Deposition Processes, Their Production and Methods of UseTHENAPPAN UE·Filed 2006·Application pending·0 cites
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