Inventor · disambiguated record
Kurt Berger
Also filed as: BERGER KURT · BERGER KURT W
8 granted patents·1 pending application·117 citations·filing 1978–2005
87Inventor score
Top patents by PatentIndex Score
9 records- 0187US7196771B2Reticle stage based linear dosimeterEUV LLC·Filed 2005·Granted Mar 27, 2007·10 cites·21 claims
- 0281US4160504APackaging unit for semiconductor discsWACKER CHEMITRONIC·Filed 1978·Granted Jul 10, 1979·46 cites·12 claims
- 0376US6781135B2Universal EUV in-band intensity detectorEUV LLC·Filed 2002·Granted Aug 24, 2004·20 cites·19 claims
- 0476US6710351B2EUV mirror based absolute incident flux detectorEUV LLC·Filed 2001·Granted Mar 23, 2004·15 cites·32 claims
- 0564US6906781B2Reticle stage based linear dosimeterEUV LLC·Filed 2002·Granted Jun 14, 2005·7 cites·14 claims
- 0640US5078914AResistance paste and resistance layer produced therefromPREH ELEKTRO FEINMECHANIK·Filed 1989·Granted Jan 7, 1992·4 cites·16 claims
- 0740US5004759AStabilisation of polyphenylene ethers with macrocyclic polyalkylpiperidine compoundsCIBA GEIGY CORP·Filed 1988·Granted Apr 2, 1991·6 cites·6 claims
- 0835US6130431AMonolithic pattern-sensitive detectorE U V L L C·Filed 1998·Granted Oct 10, 2000·9 cites·24 claims
- 0933US2002190642A1Radiation flux monitor for EUV lithographyFiled 2001·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →