Assignee
WACKER CHEMITRONIC
DE·115 granted patents·3,508 citations·filing 1975–1994
Top patents by PatentIndex Score
115 records- 0198US4179530AProcess for the deposition of pure semiconductor materialWACKER CHEMITRONIC·Filed 1979·Granted Dec 18, 1979·409 cites·4 claims
- 0295US4739589AProcess and apparatus for abrasive machining of a wafer-like workpieceWACKER CHEMITRONIC·Filed 1986·Granted Apr 26, 1988·107 cites·7 claims
- 0394US4330362ADevice and process for pulling high-purity semiconductor rods from a meltWACKER CHEMITRONIC·Filed 1981·Granted May 18, 1982·79 cites·12 claims
- 0493US4270316AProcess for evening out the amount of material removed from discs in polishingWACKER CHEMITRONIC·Filed 1979·Granted Jun 2, 1981·71 cites·4 claims
- 0592US4536642ADevice for treating gases at high temperaturesWACKER CHEMITRONIC·Filed 1983·Granted Aug 20, 1985·67 cites·3 claims
- 0692US4311545AMethod for the deposition of pure semiconductor materialWACKER CHEMITRONIC·Filed 1980·Granted Jan 19, 1982·57 cites·4 claims
- 0791US4173944ASilverplated vapor deposition chamberWACKER CHEMITRONIC·Filed 1978·Granted Nov 13, 1979·51 cites·2 claims
- 0891US4156619AProcess for cleaning semi-conductor discsWACKER CHEMITRONIC·Filed 1977·Granted May 29, 1979·65 cites·6 claims
- 0990US5242531AContinuous liquid silicon recharging process in czochralski crucible pullingWACKER CHEMITRONIC·Filed 1992·Granted Sep 7, 1993·110 cites·4 claims
- 1090US4131659AProcess for producing large-size, self-supporting plates of siliconWACKER CHEMITRONIC·Filed 1976·Granted Dec 26, 1978·46 cites·10 claims
- 1188US5487354AMethod for pulling a silicon single crystalWACKER CHEMITRONIC·Filed 1994·Granted Jan 30, 1996·84 cites·6 claims
- 1288US5324488AContinuous liquid silicon recharging process in czochralski crucible pullingWACKER CHEMITRONIC·Filed 1993·Granted Jun 28, 1994·74 cites·10 claims
- 1386US5181985AProcess for the wet-chemical surface treatment of semiconductor wafersWACKER CHEMITRONIC·Filed 1991·Granted Jan 26, 1993·156 cites·18 claims
- 1486US4175610AProcess and apparatus for the semicontinuous production of silicon moldingsWACKER CHEMITRONIC·Filed 1978·Granted Nov 27, 1979·43 cites·18 claims
- 1585US5051117AProcess for removing gaseous contaminating compounds from carrier gases containing halosilane compoundsWACKER CHEMITRONIC·Filed 1990·Granted Sep 24, 1991·60 cites·12 claims
- 1684US4539050AProcess for the manufacture of semiconductor wafers with a rear side having a gettering actionWACKER CHEMITRONIC·Filed 1983·Granted Sep 3, 1985·67 cites·12 claims
- 1783US5213451AApparatus and method of automatically separating stacked wafersWACKER CHEMITRONIC·Filed 1992·Granted May 25, 1993·114 cites·6 claims
- 1883US4454104AProcess for working up the residual gases obtained in the deposition of silicon and in the conversion of silicon tetrachlorideWACKER CHEMITRONIC·Filed 1982·Granted Jun 12, 1984·28 cites·10 claims
- 1983US4141764AProcess for the manufacture of silicon of large surface area bonded to a substrate and silicon-bonded substrates so madeWACKER CHEMITRONIC·Filed 1977·Granted Feb 27, 1979·33 cites·5 claims
- 2083US4112057AProcess for purifying halogenosilanesWACKER CHEMITRONIC·Filed 1976·Granted Sep 5, 1978·29 cites·4 claims
- 2182US4968381AMethod of haze-free polishing for semiconductor wafersWACKER CHEMITRONIC·Filed 1988·Granted Nov 6, 1990·65 cites·8 claims
- 2282US4844047AProcess for sawing crystal rods or blocks into thin wafersWACKER CHEMITRONIC·Filed 1987·Granted Jul 4, 1989·32 cites·12 claims
- 2382US4513544AMethod of sawing crystalline rods, and multiple-blade internal-hole saw for carrying out the methodWACKER CHEMITRONIC·Filed 1983·Granted Apr 30, 1985·31 cites·6 claims
- 2481US4522656AMethod of making reference surface markings on semiconductor wafers by laser beamWACKER CHEMITRONIC·Filed 1984·Granted Jun 11, 1985·57 cites·5 claims
- 2581US4194028AProcess for applying a protective layer to shaped carbon bodiesWACKER CHEMITRONIC·Filed 1978·Granted Mar 18, 1980·31 cites·15 claims
- 2681US4160504APackaging unit for semiconductor discsWACKER CHEMITRONIC·Filed 1978·Granted Jul 10, 1979·46 cites·12 claims
- 2778US4973563AProcess for preserving the surface of silicon wafersWACKER CHEMITRONIC·Filed 1989·Granted Nov 27, 1990·49 cites·8 claims
- 2878US4971654AProcess and apparatus for etching semiconductor surfacesWACKER CHEMITRONIC·Filed 1988·Granted Nov 20, 1990·61 cites·9 claims
- 2978US4118058ATool for the contact-free support of discsWACKER CHEMITRONIC·Filed 1977·Granted Oct 3, 1978·28 cites·5 claims
- 3077US4583997AProcess for reducing the hydroxyl content of optical waveguidesWACKER CHEMITRONIC·Filed 1984·Granted Apr 22, 1986·34 cites·8 claims
- 3177US4525336AProcess for removing impurities from silicon fragmentsWACKER CHEMITRONIC·Filed 1984·Granted Jun 25, 1985·24 cites·9 claims
- 3277US4283242AProcess for cementing semiconductor discs onto a carrier plateWACKER CHEMITRONIC·Filed 1979·Granted Aug 11, 1981·43 cites·3 claims
- 3377US4130632AProcess for the manufacture of trichlorosilane and silicon tetrachlorideWACKER CHEMITRONIC·Filed 1977·Granted Dec 19, 1978·26 cites·2 claims
- 3475US4330361AProcess for the manufacture of high-purity monocrystalsWACKER CHEMITRONIC·Filed 1981·Granted May 18, 1982·26 cites·3 claims
- 3571US5462011AMethod for pulling single crystalsWACKER CHEMITRONIC·Filed 1994·Granted Oct 31, 1995·22 cites·8 claims
- 3669US5464159AMethod for the contamination-free size reduction of semiconductor material, especially siliconWACKER CHEMITRONIC·Filed 1993·Granted Nov 7, 1995·26 cites·5 claims
- 3769US5400548AProcess for manufacturing semiconductor wafers having deformation ground in a defined wayWACKER CHEMITRONIC·Filed 1993·Granted Mar 28, 1995·51 cites·4 claims
- 3869US5351446AMethod and apparatus for the rotary sawing of brittle and hard materialsWACKER CHEMITRONIC·Filed 1992·Granted Oct 4, 1994·31 cites·7 claims
- 3969US5049200AProcess for the hydrophilizing and/or cement-residue-removing surface treatment of silicon wafersWACKER CHEMITRONIC·Filed 1988·Granted Sep 17, 1991·38 cites·9 claims
- 4068US5660335AMethod and device for the comminution of semiconductor materialWACKER CHEMITRONIC·Filed 1994·Granted Aug 26, 1997·22 cites·9 claims
- 4168US5089082AProcess and apparatus for producing silicon ingots having high oxygen content by crucible-free zone pulling, silicon ingots obtainable thereby and silicon wafers produced therefromWACKER CHEMITRONIC·Filed 1990·Granted Feb 18, 1992·26 cites·9 claims
- 4267US4062714AProcess for making hollow silicon bodies and bodies utilizing board-shaped members to form the basic geometric shape so madeWACKER CHEMITRONIC·Filed 1976·Granted Dec 13, 1977·20 cites·1 claims
- 4366US5108513ADevice for transporting and positioning semiconductor wafer-type workpiecesWACKER CHEMITRONIC·Filed 1990·Granted Apr 28, 1992·51 cites·2 claims
- 4466US5051134AProcess for the wet-chemical treatment of semiconductor surfacesWACKER CHEMITRONIC·Filed 1990·Granted Sep 24, 1991·56 cites·10 claims
- 4566US4515762AProcess for processing waste gases resulting during the production of siliconWACKER CHEMITRONIC·Filed 1982·Granted May 7, 1985·15 cites·4 claims
- 4666US4100014AEtching agent for III/V semiconductorsWACKER CHEMITRONIC·Filed 1977·Granted Jul 11, 1978·28 cites·14 claims
- 4764US5167667AProcess for treating polishing cloths used for semiconductor wafersWACKER CHEMITRONIC·Filed 1990·Granted Dec 1, 1992·22 cites·6 claims
- 4864US4448634AProcess for polishing III-V-semiconductor surfacesWACKER CHEMITRONIC·Filed 1983·Granted May 15, 1984·26 cites·6 claims
- 4964US4239585AProcess for the production of high purity silicon monocrystals having a low oxygen contentWACKER CHEMITRONIC·Filed 1978·Granted Dec 16, 1980·14 cites·3 claims
- 5063US4851628AMethod for the crucible-free floating zone pulling of semiconductor rods and an induction heating coil thereforWACKER CHEMITRONIC·Filed 1988·Granted Jul 25, 1989·20 cites·11 claims
Showing the top 50 of 115 patent records by PatentIndex Score.
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