Inventor · disambiguated record

Ching-Hui Ma

Also filed as: MA CHING-HUI

3 granted patents·1 pending application·17 citations·filing 2001–2003

65Inventor score

Technology areasH10P

Files withTAIWAN SEMICONDUCTOR MFG4

Top patents by PatentIndex Score

4 records

0167US6914007B2In-situ discharge to avoid arcing during plasma etch processesTAIWAN SEMICONDUCTOR MFG·Filed 2003·Granted Jul 5, 2005·11 cites·42 claims
0251US6884728B2Method for removing polymeric residue contamination on semiconductor feature sidewallsTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted Apr 26, 2005·4 cites·20 claims
0346US6727183B1Prevention of spiking in ultra low dielectric constant materialTAIWAN SEMICONDUCTOR MFG·Filed 2001·Granted Apr 27, 2004·2 cites·29 claims
0435US2004192058A1Pre-etching plasma treatment to form dual damascene with improved profileTAIWAN SEMICONDUCTOR MFG·Filed 2003·Application pending·0 cites

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →